Varian 990 dCLD II, Руководство по эксплуатации

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Model 990 dCLD II Component Leak Detector
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C.5 Helium Mass Spectrometer Leak Detection (MSLD)...........................................................C-4
C.5.1 Principles of Mass Spectrometry ...............................................................................C-4
C.5.2 Application as a Leak Detector ..................................................................................C-4
C.5.3 The Nature of Flow in a Vacuum ...............................................................................C-4
C.5.4 Facts About Leak Rates ............................................................................................C-5
C.6 Leak Detection Methods......................................................................................................C-5
C.6.1 Test Piece Evacuated (Figure C-1a and Figure C-1b) ..............................................C-6
C.6.2 Test Piece Pressurized (Figure C-2) .........................................................................C-6
C.6.3 Test Piece Already Sealed (Figure C-3) ....................................................................C-7
C.7 Mass Spectrometer Leak Detector—Simplified Description................................................C-8
Index ................................................................................................................................................. I-1
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