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Ulvac DPG-30R Скачать руководство пользователя страница 12

DC Power Supply [DPG-30R & DPG-MC60R, DPG-MC120R, DPG-MC240R]

1. For Safe Operation

2

1-2. Warning label/nameplate locations

The locations where warning labels are affixed to the system are shown in the external views in
"Chapter 7. Reference Materials". Make sure these warning labels are always clean and legible.
Use a cloth and water to clean the warning labels. Do not use gasoline or organic solvents. If a
label is damaged, missing, or illegible, contact ULVAC or an exclusive dealer.
A nameplate is affixed to the top panel of the power supply. Take special care to ensure the
nameplate is always legible.

1-3. Contact information

To order parts, ask questions about the system, and to make inquires related to system malfunctions, first
verify the system information and then contact ULVAC or an exclusive dealer. Especially when you have
determined the system has malfunctioned, inform us of the system information along with the system's
history and symptoms in as much detail as possible.

■

Product information (listed on the nameplate)

Model
Manufacturing number information (Serial No.)

Reference

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Содержание DPG-30R

Страница 1: ...u ua al l 30 kW DC Power Supply Controller Model DC power supply DPG 30R Controller DPG MC60R DPG MC120R DPG MC240R 5th Edition July 14 2023 ULVAC Inc Read this manual before using the system Store th...

Страница 2: ...r Safe Operation starting from page 1 Carefully read and understand these sections before using the system Carefully store this manual nearby so it can be used at anytime When the system s installatio...

Страница 3: ...caused by erroneous operation or inadequate maintenance and inspection work Never try to operate the system before carefully reading and understanding the operation inspection and maintenance sections...

Страница 4: ...ot be avoided Work that ignores this warning carries the risk of minor injury to workers damage to the system or the system may require adjustment There is no direct danger but this symbol notes conte...

Страница 5: ...Description Warning Be careful of heavy item handling There is a risk of injury Use the required equipment Danger Hazardous voltage There is a risk of serious bodily injury or death due to electric s...

Страница 6: ...the customer 6 Warranty disclaimer 1 A system that has exceeded the warranty period 2 Malfunction or failure caused by natural disasters like fire wind and flood damage earthquakes lightning and othe...

Страница 7: ...any questions contact to ULVAC When contacting ULVAC please inform us of the names or model numbers of the products the serial numbers and the symptoms of the problem in as much detail as possible 5...

Страница 8: ...Polybrominated biphenyls PBB Polybrominated diphenyl ether PBDE Chassis Circuit boards electrical components Cables Indicates that this hazardous substance contained in all of the homogeneous material...

Страница 9: ...ontrol terminal controller AD IF connector 9 2 6 2 External control terminal supplementary description 12 2 6 3 Recommended digital I O connection circuits 14 2 6 4 Selecting the arc detection level 1...

Страница 10: ...ting 34 4 1 4 Timing chart for power supply system control 34 4 1 5 Controller display 35 4 1 6 Error code warning code display on the controller 41 5 MAINTENANCE 44 5 1 INSPECTING AND MAINTAINING THE...

Страница 11: ...sufficient enough to pose a danger to human life The utmost care must be taken when handling the power supply If a person accidentally comes in contact with this voltage it will lead to a serious acc...

Страница 12: ...ntact ULVAC or an exclusive dealer A nameplate is affixed to the top panel of the power supply Take special care to ensure the nameplate is always legible 1 3 Contact information To order parts ask qu...

Страница 13: ...he plasma This system has an external control terminal AD IF on the controller and it operates by external control via a programmable logic controller PLC 2 2 Features A single controller can control...

Страница 14: ...r Control cable sold separately 1 cable for each power supply The DPG 30R input cable output cable and control cable are sold separately Cables are provided by ULVAC Inform us separately of the necess...

Страница 15: ...erminal are both located on the back of the power supply DC Power Supply DC Power Supply 3 GND 380 480 VAC DC Power Supply DC PS controller DPG MC120R AD I F Vacuum chamber Cathode 2 GND 100 240 VAC D...

Страница 16: ...ply DC Power Supply DC Power Supply DC PS Controller DPG MC240R AD I F Vacuum chamber Cathode 1 GND 100 240 VAC Output Input Output Input Output Input Output Input Input Anode Output Input Output Inpu...

Страница 17: ...stops and output is shut off by the low arc energy circuit Output connector connector Control Control method Constant power control P control constant current control I control 5 constant voltage con...

Страница 18: ...inlet EN60320 Input capacity MC60R 80VA or less MC120R 240R 140 VA or less Leakage current 1 mA or less Regulation Monitor accuracy The lager one of 1 or less of rated outputs and 2 of set values Res...

Страница 19: ...is performing output at the set value 14 DCFAIL Low level output while an error is detected on the DC unit 15 RESERVE Not used 16 HARC DO 0 to 24 V COMD Low level output during hard arc detection on t...

Страница 20: ...During I control becomes the corresponding system power for a output setting voltage level 0 to 10 V During V control becomes the corresponding system power for a output setting voltage level 0 to 10...

Страница 21: ...rface digital signal common return 20 COML User interface LEVEL signal common return 21 LEVEL AI 0 to 10 V COML DC unit output setting voltage 0 to 10 V 4 22 COMA User interface analog signal common r...

Страница 22: ...ore Signals are active at low Digital signal output DO 24 V 5mA to 20mA 1ch Analog signals Analog signal input AI 0 to 10 V Analog signal output AO Voltage 0 to 1500 V 0 to 10 V Current 0 to 60 A 0 to...

Страница 23: ...R 240R AD INTERFACE side PLC side DCV 3 DCI 4 AI Analog input LEVEL 21 LEVEL COM L 0 01 F 2 2 k 0 01 F 2 2 k COM L COM L COM L COM L PLC side DPG MC60R 120R 240R AD INTERFACE side COM L ISO AMP COM L...

Страница 24: ...connector The arc detection level can be selected by combining the signals Table 2 8 Arc detection level selection input Control mode ARCSET0 Pin 23 ARCSET1 Pin 24 150 V High High 120 V High Low 90 V...

Страница 25: ...r as Low Table 2 10 ARCDELAY mode selection input About ARCDELAY mode This product has the Low ARC ENERGY circuit as output part Usually ARC ENERGY is small specification in order to perform separatio...

Страница 26: ...number of accessories and inspect the exterior of the unit and accessories Standard accessories Unit 1 Cables are all optional accessories When removing the unit from the shipping container attach th...

Страница 27: ...DC Power Supply DPG 30R DPG MC60R DPG MC120R DPG MC240R 3 Setup 17 3 2 Part names and functions 3 2 1 DC power supply front and rear panels Figure 3 2 DC power supply front panel...

Страница 28: ...limit LED orange V IN LIMIT Turns on when the input voltage exceeded the upper limit or the lower limit LED orange L ARC OFF Turns off when by the back LARC switch ON Turns on when by the back LARC s...

Страница 29: ...aying the output power output current HARC monitor 5 HARC kW A indicator LEDs LED HARC orange Turns on when a connected power supply has detected Hard ARC When displaying Arc Count the number of times...

Страница 30: ...error display Displays the next error During the output setting value entry mode Decreases LEVEL output command value FUNC Decreases the LEVEL output command value setting digit ENT SW Push button Not...

Страница 31: ...1 RMT side REMOTE control 2 LCL side LOCAL control 3 ARC LEVEL selection switch Rotary switch ARC LEVEL setting switch 1 60 V 2 90 V 3 120 V 4 150 V Only enabled during LOCAL 4 Power selection switch...

Страница 32: ...Connector Not used 11 Nameplate Shows the model and serial number 12 Specification label Indicates the model input specification weight etc 1 13 RS232C Connector Not used 1 Listed on the top panel 2 T...

Страница 33: ...HARC DO 0 to 24V COM High speed pulse Low level output between 32us during hard arc detection on the DC unit 4 COM Fast hard arc signal common return 5 FAST MARC DO 0 to 24V COM High speed pulse Low...

Страница 34: ...s over 1000 V so it falls under the category of high voltage equipment Therefore a Class A ground previous term Class 1 ground with a ground resistance of 10 or lower is required According to Japanese...

Страница 35: ...gure 3 7 and Figure 3 8 for the positions to drill the mounting holes The front panels of the DC power supply and the controller do not have a structure that can support the weight of the units For th...

Страница 36: ...olation bushings When mounting the DC power supply and the controller in a rack isolate the controller from the rack by attaching isolation bushings as shown in Figures 3 9 and 3 10 Isolate the power...

Страница 37: ...MC60R DPG MC120R DPG MC240R 3 Setup 27 Figure 3 10 Isolation bushing attachment positions controller Select a location as dust and vibration free as possible Avoid installing the units in a location w...

Страница 38: ...specifications If operated at a temperature outside specifications the equipment may stop because of an alarm the DC power supply may malfunction or the system s lifespan may be affected Top panel Pow...

Страница 39: ...When connecting and disconnecting cables ensure that the breakers for the input lines supplying the DC power supplies and the controller are turned off 3 4 1 Cables to connect to the DPG 30R and DPG M...

Страница 40: ...2 DC 1 DC4 DC 3 AD IF Controller DPG MC120R DC output 4 DC output 3 DC output 2 DC output 1 CONTROL CONTROL CONTROL AC in 100 240 V PLC CONTROL AC in 380 480 V Control Control Control Control Load AC...

Страница 41: ...ONTROL CONTROL CONTROL AC in 100 240 V PLC CONTROL Control Control Control Control Load DC output 8 DC output 7 DC output 6 DC output 5 CONTROL CONTROL CONTROL Control Control Control Control DC6 DC5...

Страница 42: ...ng switch Connection with DC PSUs DC1 to DC4 when 120kW setting DC1 to DC8 when 240kW setting Connection with external PLC Figure 3 14 Power supply and external PLC connections top MC120R bottom MC240...

Страница 43: ...the power supplies By connecting the power supplies to an external control device such as a PLC all necessary information can be communicated through the analog and digital interface 4 1 2 Controller...

Страница 44: ...to 180A 0 to 165A 0 to 240A 0 to 220A 0 to 300A 0 to 275A 0 to 360A 0 to 330A 0 to 420A 0 to 385A 0 to 480A 0 to 440A P control 0 to 30kW 0 to 60kW 0 to 90kW 0 to 120kW 0 to 150kW 0 to 180kW 0 to 210k...

Страница 45: ...80 to 480 VAC energize the controller with 100 to 240 VAC then turn on the power switch When these operations are performed the controller s panel will show a display like those below 1 Each 7 segment...

Страница 46: ...SET V 10 The CPLD firmware version turns on for 1 0 second ex Ver 00 01 HARC kW A MARC SET V 11 The current DC equipment type is shown for 1 0 second this display changes with the power selector switc...

Страница 47: ...The monitor display after power supply startup is the power monitor display and the voltage monitor display You can change the display by pressing the DISP key The monitor values are listed below Powe...

Страница 48: ...the corresponding LED indicators turn on Ex During 120 kW 545 V 220 A output HARC kW A MARC SET V V kW Power monitor Voltage monitor HARC kW A MARC SET V V A Current monitor Voltage monitor Changes w...

Страница 49: ...SET V V kW Power monitor Voltage monitor Changes with the control mode currently used PSEL P control HARC kW A MARC SET V SET kW Flashing ISEL I control HARC kW A MARC SET V SET A Flashing VSEL V cont...

Страница 50: ...he host PLC only Remote mode If the abnormal state does not continue after the error is reset the display returns to the power current monitor display For warnings the error code display is cleared wh...

Страница 51: ...code list The error code warning code and its contents displayed on a controller is as follows Table 4 3 Controller error display No Error name Code Error details Classification 1 Configuration error...

Страница 52: ...n operating by two or more sets using controller connected other power supplies perform stop operation of DC output at the time of an output 2 Stop operation of the DC output Outputs a signal DCFAIL E...

Страница 53: ...hen the Error remains Ex ERROR occurs occur in the order of E310 E330 E310 is canceled and reset E330 is canceled and reset DC FAIL F ERROR 1 E1 ERROR 2 E2 ERROR 0 E0 F E0 E1 E2 E310 0 0 1 1 E330 0 0...

Страница 54: ...ections and the clearance for the power supply intake and exhaust vents When performing maintenance always shut off the primary side breaker of the power supply used before working and shut off your u...

Страница 55: ...ed replacement period is not a guarantee of the product s lifespan The rate of consumption of these components may also greatly differ according to the frequency of equipment usage and the environment...

Страница 56: ...eplace the relevant power supply or controller 2 Cannot release the interlock 1 The photocoupler between pins 35 37 for the analog digital interface AD IF on the external control device cannot turn on...

Страница 57: ...that the AD I F connector is connected 2 Check the control mode See 2 6 5 on page 12 9 FAN ERROR Cooling fan error Replace the power supply 10 LARC OVER CURRENT ERROR Low ARC unit section overcurrent...

Страница 58: ...als The following materials on the DPG 30R and DPG MC60R MC120R MC240R are included with this manual as a reference 1 DPG 30R external view 2 DPG MC60R external view 3 DPG MC120R external view 4 DPG M...

Страница 59: ...DC Power Supply DPG 30R DPG MC60R DPG MC120R DPG MC240R 7 Reference Materials 49 Figure 7 1 DPG 30R external view...

Страница 60: ...DC Power Supply DPG 30R DPG MC60R DPG MC120R DPG MC240R 7 Reference Materials 50 Figure 7 2 DPG MC60R external view...

Страница 61: ...DC Power Supply DPG 30R DPG MC60R DPG MC120R DPG MC240R 7 Reference Materials 51 Figure 7 3 DPG MC120R external view...

Страница 62: ...DC Power Supply DPG 30R DPG MC60R DPG MC120R DPG MC240R 7 Reference Materials 52 Figure 7 4 DPG MC240R external view...

Страница 63: ...DC Power Supply DPG 30R DPG MC60R DPG MC120R DPG MC240R 7 Reference Materials 53 Figure 7 5 DPG 30R warning label locations...

Страница 64: ...DC Power Supply DPG 30R DPG MC60R DPG MC120R DPG MC240R 7 Reference Materials 54 Figure 7 6 DPG MC60R warning label locations...

Страница 65: ...Power Supply DPG 30R DPG MC60R DPG MC120R DPG MC240R 7 Reference Materials 55 Weight warning Weight label Nameplate label 11kg Danger high voltage Figure 7 6 DPG MC120R DPG 240R warning label locatio...

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