Toshiba TH180, Инструкция по эксплуатации

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STE 73995
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TRANSPORTATION AND INSTALLATION MANUAL
2.7 Using the Robot in Clean Room
The main robot is designed pursuant to the Clean Class 10.
To be more specific, when this robot is operated in the clean bench (Clean Class 1 or
less) installed in the downflow clean room, the number of 0.3 µm or more fine particles
in 1 ft
3
as measured on the surface of the axis 3 stroke lower limit position is 10 or less.
The downflow air speed should be 0.3 to 0.5 m/s.
As the TS1000 controller is not designed to satisfy the specified clean class, take
careful precautions to select the place of installation.
In the clean robot, an air tube is incorporated for ventilation. To operate it as the clean
robot, scavenge by connecting a scavenging vacuum pump (or equivalent, which is to
be provided by the customer) with the air joint. The target scavenging volume is 50
L/min.
When the robot is operated without scavenging, the specified clean class cannot be
maintained.