Primes HP-MSM-HB, Оригинальное руководство пользователя

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24
Revision 00 EN - 01/2021
HP-MSM-HB
35,0(6
The measuring plane distance depends on the beam path (standard, magnification objective MO, alignment
objective AO) (see Tab. 7.1 on page 24).
Measuring Objective
Wavelength
in nm
Length of align-
ment tool
in mm
Measuring plane distance
in mm
Standard MO AO
MOB HP-MSM-HB, 5-fold 1064 – 32,8 32,8 32,3
Tab. 7.1: Measuring plane distances
X
Put the alignment tool on the cyclone. The upper corner equals the z-position of the measuring plane of
the objective.
X Turn on the pilot laser. If the laser hits the little bore in the cover vertically, it is displayed centrally on the
sensor. Typically, the misalignment angle between the beam and the instrument axis should not exceed a
divergence of 10 mrad (0.5°).
X If the laser beam does not hit the bore vertically, you can align the HP-MSM-HB with the 6 screws in the
threaded holes.
X
Finally, fasten the device, so that it cannot be moved by accidental bumping or pulling on the cables.
Fig. 7.5: Fastening bores HP-MSM-HB, view from above
2 Mounting holes Ø 6,6 mm
6 thread holes M8x1 for the alignment