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15
Revision 00 EN - 01/2021
HP-MSM-HB
35,0(6
4.5
Measuring principle
There are several beam splitters integrated in the measuring objective so that 99.9 % of the laser power is
guided to appropriately dimensioned absorbers via the beam splitter. The laser beam is attenuated by further
optical elements in the device until it can be guided to a CCD sensor.
Measuring Plane
Upper Limit
Mirrows
Trigger diode
Filter Wheel
Lower Limit
Measuring Objective
Magnification Objective (MO)
Absorber
Laser Beam
Absorber
Alignment Objectiv (JO)
CCD-Sensor
Fixed Filter
Prisms
Fig. 4.3:
Principle illustration of the optomechanical design
Содержание HP-MSM-HB
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