PI Q-Motion Q-632, Руководство пользователя

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10 Technical Data
Q-632 Miniature Rotation Stage MP129E Version: 1.1.2 45
10.4.2 C-815.VF Vacuum Feedthrough
D-sub 15 (m/f)
Figure 15: Vacuum side: D-sub 15 (f)
Figure 16: Air side: D-sub 15 (m) panel plug
Vacuum side (f) Air side (m)
Pin Signal Function Pin
1 REF - Reference signal differential (-) 1
2 Motor (-) Motor signal differential (-) 2
3 Motor (+) Motor signal differential (+) 3
4 V
DD
Supply voltage (+5 V) 4
5 - - 5
6 ID chip data ID chip data 6
7 SIN - Encoder A (-) 7
8 COS - Encoder B (-) 8
9 Motor (-) Motor signal differential (-) 9
10 GND GND 10
11 Motor (+) Motor signal differential (+) 11
12 - - 12
13 REF + Reference signal differential (+) 13
14 SIN + Encoder A (+) 14
15 COS + Encoder B (+) 15