Pfeiffer Vacuum HIPACE 80 NEO Скачать руководство пользователя страница 30 | Manualshive

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Using additional accessories

► Observe the installation instructions in the operating instructions for the relevant accessory.
► Note the existing configuration of existing connections and control lines.
► Use a Pfeiffer Vacuum display and control unit with an integrated power supply pack.

5.5 Connecting the electrical supply

WARNING

Risk of danger to life through missing mains disconnection device

The vacuum pump and electronic drive unit are

not

equipped with a mains disconnection device

(mains switch).

► Install a mains disconnection device according to SEMI-S2.
► Install a circuit breaker with an interruption rating of at least 10,000 A.

WARNING

Risk of injury due to incorrect installation

Dangerous situations may arise from unsafe or incorrect installation.

► Do not carry out your own conversions or modifications on the unit.
► Ensure the integration into an Emergency Off safety circuit.

5.5.1 Ground turbopump

Pfeiffer Vacuum recommends connecting a suitable grounding cable to discharge applicative interfer-
ences.

M4

Fig. 12:

Example: Connect the grounding cable

Procedure

1. Use the turbopump ground terminal (M4 female thread).
2. Route the connection in accordance with locally applicable provisions.

5.5.2 Establishing electric connection

DANGER

Danger to life from electric shock

Power supply packs that are not specified or are not approved will lead to severe injury to death.

► Make sure that the power supply pack meets the requirements for double isolation between

mains input voltage and output voltage, in accordance with IEC 61010-1 IEC 60950-1 and
IEC 62368-1.

► Make sure that the power supply pack meets the requirements in accordance with IEC 61010-1

IEC 60950-1 and IEC 62368-1.

► Where possible, use original power supply packs or only power supply packs that correspond

with the applicable safety regulations.

Installation

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Содержание HIPACE 80 NEO

Страница 1: ...OPERATING INSTRUCTIONS EN Translation of the Original HIPACE 80 NEO Turbopump...

Страница 2: ...fer vacuum de Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website Disclaimer of liability These operating instructions describe all models and varian...

Страница 3: ...1 2 Rotor bearing 18 3 1 3 Drive 19 3 2 Identifying the product 19 3 2 1 Product types 19 3 2 2 Product features 19 3 3 Scope of delivery 19 4 Transportation and Storage 20 4 1 Transport 20 4 2 Storag...

Страница 4: ...erating fluid reservoir 38 7 3 1 Remove operating fluid reservoir 39 7 3 2 Assemble operating fluid reservoir 40 7 4 Replace electronic drive unit 41 7 5 Confirming speed specification 42 8 Decommissi...

Страница 5: ...urbopumps when delivered 33 Tbl 9 Behavior and meaning of the LEDs on the electronic drive unit 35 Tbl 10 Factory settings for delayed venting in turbopumps 36 Tbl 11 Maintenance intervals 38 Tbl 12 C...

Страница 6: ...crew and tapped hole 27 Fig 9 Flange connection CF F stud screw and through hole 28 Fig 10 Example of fore vacuum connection on MVP 28 Fig 11 Accessory connection via adapter TCS 12 29 Fig 12 Example...

Страница 7: ...load Center 1 1 2 Variants Turbopump High vacuum flange versions Fore vacuum connection versions HiPace 80 Neo TC 80 DN 63 ISO K G 1 4 DN 16 ISO KF DN 25 ISO KF DN 63 CF F DN 40 ISO KF Tbl 1 Variants...

Страница 8: ..._ _ _ _ P N n f Mass Made in Germany 2020 10 PM 203 490 T 90000 1 min 1500 Hz 1 7 kg D 35614 Asslar Type 12 IP54 Rating plate The rating plate of the turbopump is located on the lower part of the vac...

Страница 9: ...high vacuum side ISO Flange Connector in accordance with ISO 1609 and ISO 2861 LED Light emitting diode FE Functional earth P xxx Electronic drive unit control parameters Printed in bold as a three d...

Страница 10: ...amage to property Is used to highlight actions that are not associated with personal injury Instructions to avoid damage to property Notes tips or examples indicate important information about the pro...

Страница 11: ...e e g open vacuum chamber WARNING Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction Sudden jamming of the rotor generates high destructi...

Страница 12: ...suitable touch protection in system solutions Risks during operation WARNING Risk of burns on hot surfaces when using additional equipment for heating during operation The use of additional equipment...

Страница 13: ...opump before maintenance work results in hazardous situations with risk of injury There is a risk of cuts from accessing sharp edged rotating parts when removing the turbopump Wait until the turbopump...

Страница 14: ...autions on site for the compensation of the occurring torques Before installing a vibration compensator you must first of all contact Pfeiffer Vacuum WARNING Danger to life from poisoning where toxic...

Страница 15: ...Keep lines and cables away from hot surfaces 70 C Never fill or operate the unit with cleaning agents or cleaning agent residues Do not carry out your own conversions or modifications on the unit Obs...

Страница 16: ...osive media Pumping of condensing vapors Pumping of fluids Pumping of dust Operation with impermissible high gas throughput Operation with impermissible high fore vacuum pressure Operation with excess...

Страница 17: ...guidelines and laws referred to in this documentation The above individuals must have an explicitly granted operational authorization to commission program configure mark and earth devices systems and...

Страница 18: ...ork 8 9 10 5 4 6 7 12 11 14 1 3 2 13 Fig 2 Design of HiPace 80 Neo 1 Protective cap for the high vacuum connection 8 Pump housing stainless steel 2 Micro USB sockets with sealing plugs 9 Venting screw...

Страница 19: ...me the size which is based on the pumping speed of the vacuum pump and if required an additional feature description Family Size model Property attribute feature HiPace 10 to 2800 none Standard versio...

Страница 20: ...weight specified on the rating plate Where possible always transport or ship the turbopump in its original packaging Always carry the turbopump with both hands Remove the protective cover only immedi...

Страница 21: ...allation Do not start the turbopump with open vacuum connections Always carry out the mechanical installation before electrical connection Prevent access to the high vacuum connection of the turbopump...

Страница 22: ...Neo Maximum torque occurring in the event of a burst1 620 Nm Maximum permissible axial load on the high vacuum flange2 200 N equivalent to 20 kg Flatness 0 05 mm Minimum tensile strength of the flange...

Страница 23: ...rotor in the high vacuum flange 5 2 4 Using the vibration compensator Pfeiffer Vacuum vibration compensators are suitable for use on vibration sensitive systems WARNING Risk of injury caused by the tu...

Страница 24: ...any forces from the piping system to act on the turbopump 4 Do not load the high vacuum flange of the turbopump on one side 5 2 6 Installation of ISO KF flange ISO flange connections For the connecti...

Страница 25: ...ket screws cross wise in 3 steps Tightening torque 5 15 25 2 Nm 5 2 8 Installation of ISO K flange onto ISO F The connection types for the installation of ISO K with ISO F flange are Claw and tapped h...

Страница 26: ...rve the minimum tensile strength of the flange material and the screw in depth 3 Place the collar flange over the high vacuum flange on the turbopump 4 Insert the snap ring into the side groove on the...

Страница 27: ...h vacuum flange 3 Place the seal exactly in the hollow 4 Connect the flange with the components of the mounting kit according to the figure 5 Tighten the screw couplings all the way around Tightening...

Страница 28: ...auses fittings to accelerate There is the risk of damaging on site connections e g fore vacuum line and resulting leaks This results in leakage of process media In processes involving toxic media ther...

Страница 29: ...for approved accessories for hybrid bearing turbo pumps can be found online Connect accessory devices to the TC 80 Use of Pfeiffer Vacuum accessories via the electronic drive unit TC 80 is enabled via...

Страница 30: ...the unit Ensure the integration into an Emergency Off safety circuit 5 5 1 Ground turbopump Pfeiffer Vacuum recommends connecting a suitable grounding cable to discharge applicative interfer ences M4...

Страница 31: ...supply pack Voltage supply via power supply pack Automatic ramp up with bridges on pins 2 5 7 Connector to display and control unit via RS 485 Connection cable with RS 485 interface ac cessory connec...

Страница 32: ...radiation or strong magnetic fields results in uncontrolled heating of the rotor and can destroy the vacuum pump Consult Pfeiffer Vacuum before combining varying loads on the vacuum pump Lower limit v...

Страница 33: ...y of the turbopump immediately before operation After applying the operating voltage the electronic drive unit carries out a self test to check the supply voltage After completing the self test succes...

Страница 34: ...pment e g gloves WARNING Risk of serious injury in the event of vacuum pump destruction due to over pressure Gas entry with very high over pressure results in destruction of the vacuum pump There is a...

Страница 35: ...6 5 1 Switching off NOTICE Damage to the turbopump and electronic drive unit due to improper disconnection of compo nents Even after the mains power is switched off the turbopump continues to deliver...

Страница 36: ...ximum 3 Wait for pressure equalization to atmospheric pressure in the vacuum system 4 Close the venting screw again Use a Pfeiffer Vacuum venting valve The Pfeiffer Vacuum venting valve is an optional...

Страница 37: ...pen high vacuum connec tion Incorrect handling of the turbopump before maintenance work results in hazardous situations with risk of injury There is a risk of cuts from accessing sharp edged rotating...

Страница 38: ...ottom part Partially disassemble the vacuum pump Replace the operating fluid reservoir Replace the bearing hous ing Function test Spare parts package 1 bearing Maintenance level 3 Overhaul Dismantle a...

Страница 39: ...erating fluid reservoir This information can be found on the pump rating plate You can find the safety data sheet in the Pfeiffer Vacuum Download Center Prerequisites Turbopump off Vacuum system vente...

Страница 40: ...ing agents 7 3 2 Assemble operating fluid reservoir Required consumables Laboratory gloves Operating fluid reservoir Required tools Torx screwdriver TX 10 Tweezers Screwdriver Calibrated torque wrench...

Страница 41: ...at the workstation Observe EN 61340 Protection of electronic devices from electrostatic phenomena Backing up settings made by the customer The factory operating parameters are always preset in replace...

Страница 42: ...speed is part of a redundant safety system as a measure for preventing excess rotation speed The redundant confirmation of the nominal rotation speed of a turbopump is possible by adjusting the P 777...

Страница 43: ...rs only within the specified temperature range 9 In rooms with humid or aggressive atmospheres Hermetically seal the turbopump together with a drying agent in a plastic bag 8 2 Recommissioning NOTICE...

Страница 44: ...must be disposed of in accordance with the applica ble regulations relating to environmental protection and human health with a view to reducing natural resource wastage and preventing pollution 9 1 G...

Страница 45: ...event of a malfunction Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892 When using a vibration compensator this will probably lead to the turbopump being she...

Страница 46: ...lay and control unit Thermal load due to lack of ventilation water flow too low fore vacuum pressure too high ambient temperature too high Reduce the thermal load Ensure adequate air supply Adjust the...

Страница 47: ...ity You can find more detailed information and addresses on our homepage in the Pfeiffer Vacuum Service section You can obtain advice on the optimal solution for you from your Pfeiffer Vacuum represen...

Страница 48: ...duct in suitable stable transport containers only e Maintain applicable transport conditions ERKL RUNG KONTAMINIERUNG 6 Attach the contamination declaration to the outside of the packag ing 7 Now send...

Страница 49: ...Position Designation Order number Remark Pieces 1 Electronic drive unit TC 80 refer to the rating plate 1 2 Operating fluid reservoir refer to the rating plate incl capillary rods and seal 1 Tbl 14 O...

Страница 50: ...g For processes with low gas throughputs and good fore vacuum pressure air cooling can be used inde pendently of a water supply Automatic control through the integrated electronic drive unit of the tu...

Страница 51: ...ts from TC 80 110 120 to power supply pack diode 1 m PM 071 760 T Connection cable angled with RS 485 interface and two accessory ports from TC 80 110 120 to power supply pack diode 3 m PM 071 761 T D...

Страница 52: ...und pressure level at distance to vacuum pump 1 m mbar bar Pa hPa kPa Torr mm Hg mbar 1 1 10 3 100 1 0 1 0 75 bar 1000 1 1 105 1000 100 750 Pa 0 01 1 10 5 1 0 01 1 10 3 7 5 10 3 hPa 1 1 10 3 100 1 0 1...

Страница 53: ...Pa 22 hPa 22 hPa Rotation speed 2 90000 rpm 90000 rpm 90000 rpm Rotation speed variable 50 100 50 100 50 100 Performance curve in gas mode 0 vertex C 56 90000 W min 1 56 90000 W min 1 56 90000 W min 1...

Страница 54: ...ssible axial magnetic field max 23 mT 23 mT 23 mT Permissible irradiated thermal out put max 1 2 W 1 2 W 1 2 W Shipping and storage temperature 25 55 C 25 55 C 25 55 C Weight 1 7 kg 1 7 kg 3 1 kg Tbl...

Страница 55: ...o DN 40 ISO KF M5 10 tief 4x 30 129 116 2 91 97 56 2 86 54 5 33 43 6 1 5 65 6 46 DN 63 ISO K DN 16 ISO KF G1 4 67 4 Fig 19 HiPace 80 Neo DN 63 ISO K 30 54 5 33 43 86 46 65 6 113 5 6 1 5 56 2 97 2 122...

Страница 56: ...substances delegated directive 2015 863 EU Harmonized standards and applied national standards and specifications DIN EN ISO 12100 2011 ISO 21360 1 2016 DIN EN 1012 2 2011 ISO 21360 4 2018 DIN EN 610...

Страница 57: ...57 58...

Страница 58: ...PT0660 ed A Date 2109 P N PT0660BEN...

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