Pfeiffer Vacuum HIPACE 80 NEO, Руководство по эксплуатации

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Turbopump will not start up;
green LED on the electronic
drive unit is flashing
● For operation without
control unit: Pins 2-7
and 5-7 on the “X3” con-
nection are not connect-
ed
● Connect the connections according to the electronic
drive unit connection diagram.
● Check the bridges on the connection cable.
● For operation via
RS-485: The bridge be-
tween pins 5 and 7 in-
hibits control commands
● Remove the bridge from the “X3” connection.
● Check the connection cable.
● For operation via
RS-485: Parameters not
set in the electronic
drive unit
● Set the parameters [P: 010] and [P: 023] via the in-
terface RS-485 to 1 = "ON".
● Voltage drop in the ca-
ble is too high
● Check the connection cable.
● Use a suitable connection cable.
Turbopump fails to reach the
nominal rotation speed within
the set run-up time
● fore-vacuum pressure
too high
● Check backup pump compatibility (see technical
data).
● Check that the backup pump is working.
● Leakage on the turbo-
pump
● Carry out leak detection.
● Check seals and flange connections.
● Eliminate leaks.
● Gas throughput too high ● Reduce the process gas load.
● Rotor not running
smoothly, defective
bearing
● Check the turbopump for noise development
● Contact Pfeiffer Vacuum Service.
● Run-up time setpoint
adjusted too low
● Extend the run-up time setpoint [P:700] via a dis-
play and control unit.
Thermal load due to:
● lack of ventilation
● water flow too low
● fore-vacuum pressure
too high
● ambient temperature too
high
● Reduce the thermal load.
─ Ensure adequate air supply.
─ Adjust the cooling water flow.
─ Reduce the fore-vacuum pressure.
─ Adapt the ambient conditions.
Turbopump not achieving the ul-
timate pressure
● Turbopump is polluted ● Heat the turbopump if required.
● Have it cleaned.
● Contact Pfeiffer Vacuum Service.
● Vacuum chamber, pipes
or turbopump leaking
● Carry out leak detection starting from the vacuum
chamber.
● Check seals and flange connections.
● Eliminate leaks in the vacuum system.
Unusual noises during operation ● Rotor bearing damaged ● Contact Pfeiffer Vacuum Service.
● Rotor damaged ● Contact Pfeiffer Vacuum Service.
● Splinter shield or protec-
tive screen loose
● Check and correct the seat of the splinter shield or
protective screen in the high vacuum flange.
● Follow the installation instructions.
Red LED on the electronic drive
unit illuminates
● Group error ● Reset the malfunction by switching the current sup-
ply off and on.
● Reset the malfunction with V+ on pin 6 on the “X3”
connection.
● Set the parameter [P: 009] via the interface RS-485
to 1 = Malfunction acknowledgment.
● Set the parameter [P: 010] via the interface RS-485
to 0 = off and then 1 = On and Malfunction acknowl-
edgment.
● Carry out a differentiated malfunction analysis with
a display and control unit.
● Contact Pfeiffer Vacuum Service.
Tbl. 13: Troubleshooting turbopumps
Malfunctions
46/58