Pumping speed backing pump at 50 Hz
1 m³/h
0.75 m³/h
1.8 m³/h
Pump-down time for vacuum chamber
size 1 l
56 s
84 s
15 s
Pump-down time for vacuum chamber
size 10 l
560 s
836 s
145 s
Pump-down time for vacuum chamber
size 100 l
5595 s
8358 s
1451 s
Mains requirement: voltage
100 – 240 V
100 – 240 V
100 – 240 V
Mains requirement: frequency (range)
50/60 Hz
50/60 Hz
50/60 Hz
Cooling method, standard
Air
Air
Air
Relative humidity of air
5-85 %, non-condensing 5-85 %, non-condensing 5-85 %, non-condensing
Weight
11.7 kg
13.4 kg
13.3 kg
Tbl. 18:
Technical data for HiCube 30 Eco, DN 63 ISOK
Classification
HiCube 80 Eco
HiCube 80 Eco
HiCube 80 Eco
Flange (in)
DN 40 ISO-KF
DN 40 ISO-KF
DN 40 ISO-KF
Flange (out)
Silencer, G 1/8"
Silencer, G 1/8"
Silencer, G 1/8"
Turbopump
HiPace 80
HiPace 80
HiPace 80
Backing pump
MVP 015-2
MVP 015-4
MVP 030-3
Ultimate pressure
< 1 · 10
-7
hPa
< 1 · 10
-7
hPa
< 1 · 10
-7
hPa
Pumping speed for N
2
35 l/s
35 l/s
35 l/s
Pumping speed backing pump at 50 Hz
1 m³/h
0.75 m³/h
1.8 m³/h
Pump-down time for vacuum chamber
size 1 l
56 s
83 s
14 s
Pump-down time for vacuum chamber
size 10 l
557 s
834 s
143 s
Pump-down time for vacuum chamber
size 100 l
5572 s
8335 s
1428 s
Mains requirement: voltage
100 – 240 V
100 – 240 V
100 – 240 V
Mains requirement: frequency (range)
50/60 Hz
50/60 Hz
50/60 Hz
Cooling method, standard
Air
Air
Air
Relative humidity of air
5-85 %, non-condensing 5-85 %, non-condensing 5-85 %, non-condensing
Weight
12.1 kg
13.8 kg
13.7 kg
Tbl. 19:
Technical data for HiCube 80 Eco, DN 40 ISOKF
Classification
HiCube 80 Eco
HiCube 80 Eco
HiCube 80 Eco
Flange (in)
DN 63 CF-F
DN 63 CF-F
DN 63 CF-F
Flange (out)
Silencer, G 1/8"
Silencer, G 1/8"
Silencer, G 1/8"
Turbopump
HiPace 80
HiPace 80
HiPace 80
Backing pump
MVP 015-2
MVP 015-4
MVP 030-3
Ultimate pressure
< 1 · 10
-8
hPa
< 1 · 10
-8
hPa
< 1 · 10
-8
hPa
Pumping speed for N
2
67 l/s
67 l/s
67 l/s
Pumping speed backing pump at 50 Hz
1 m³/h
0.75 m³/h
1.8 m³/h
Pump-down time for vacuum chamber
size 1 l
56 s
83 s
14 s
Technical data and dimensions
49/56