Connection of stud screw and throughbore
1. Only use the approved fastening sets from Pfeiffer Vacuum for the connection.
2. Place the collar flange over the high vacuum flange on the turbopump.
3. Insert the snap ring into the side groove on the high vacuum flange of the turbopump.
4. Fasten the turbopump onto the counter flange in accordance with the diagram using the collar
flange, snap ring and centering ring.
5. Use all prescribed components for the turbopump.
6. Tighten the nuts in 3 stages in opposite pairs.
7. Tightening torque:
5, 10, 16 ± 1 Nm
5.3.7 Installation of CF flanges
The connection types for the installation of CF with CF flange are:
● "Hexagonal screw and through-bore"
● "Stud screw and threaded hole"
● "Stud screw and through-bore"
NOTICE
Leaks may occur due to the incorrect installation of CF flanges
Inadequate cleanliness when handling CF flanges and copper seals results in leaks and may cause
process damage.
► Always wear suitable gloves before touching or fitting any components.
► Fit seals only if dry and free of grease.
► Note any damaged surfaces and cutting edges.
► Replace the damaged components.
Connection of hexagonal screw and throughbore
1. Only use the approved mounting kits from Pfeiffer Vacuum for the connection.
2. If used: Insert the protective screen or splinter shield with the clamping lugs pointing downward
into the high vacuum flange.
3. Place the seal precisely in the hollow.
4. Connect the flange according to the diagram using the components in the mounting kit.
5. Tighten the screw connections all the way around.
– Tightening torque:
22 ± 2 Nm
6. After this, check the torque as flowing of the sealing material may make it necessary to tighten the
screws.
Installation
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