Pfeiffer Vacuum HICUBE ECO, Руководство по эксплуатации

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Pump-down
time for vac-
uum chamber
size 1 l 55 s 83 s 14 s 55 s 83 s 14 s
Pump-down
time for vac-
uum chamber
size 10 l 553 s 830 s 138 s 553 s 830 s 138 s
Pump-down
time for vac-
uum chamber
size 100 l 5532 s 8295 s 1382 s 5532 s 8295 s 1382 s
Mains require-
ment: voltage 100 – 240 V 100 – 240 V 100 – 240 V 100 – 240 V 100 – 240 V 100 – 240 V
Mains require-
ment: frequen-
cy (range) 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz 50/60 Hz
Cooling meth-
od, standard Air Air Air Air Air Air
Relative hu-
midity of air 5-85 %, non-
condensing 5-85 %, non-
condensing 5-85 %, non-
condensing 5-85 %, non-
condensing 5-85 %, non-
condensing 5-85 %, non-
condensing
Weight 17.9 kg 19.6 kg 19.5 kg 17.9 kg 19.6 kg 19.5 kg
Tbl. 22: Technical data for HiCube 300 Eco, DN 100 CF­F
Classification HiCube 300
Eco HiCube 300
Eco HiCube 300
Eco HiCube 300
Eco HiCube 300
Eco HiCube 300
Eco
Flange (in) DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K DN 100 ISO-K
Flange (out) Silencer,
G 1/8" Silencer,
G 1/8" Silencer,
G 1/8" Silencer,
G 1/8" Silencer,
G 1/8" Silencer,
G 1/8"
Turbopump HiPace 300 HiPace 300 HiPace 300 HiPace 300 H HiPace 300 H HiPace 300 H
Backing
pump MVP 015-2 MVP 015-4 MVP 030-3 MVP 015-2 MVP 015-4 MVP 030-3
Ultimate
pressure
< 1 · 10 -7 hPa < 1 · 10 -7 hPa < 1 · 10 -7 hPa < 1 · 10 -7 hPa < 1 · 10 -7 hPa < 1 · 10 -7 hPa
Pumping
speed for N
2
260 l/s 260 l/s 260 l/s 260 l/s 260 l/s 260 l/s
Pumping
speed back-
ing pump at
50 Hz 1 m³/h 0.75 m³/h 1.8 m³/h 1 m³/h 0.75 m³/h 1.8 m³/h
Pump-down
time for vac-
uum cham-
ber size 1 l 55 s 83 s 14 s 55 s 83 s 14 s
Pump-down
time for vac-
uum cham-
ber size 10 l 553 s 830 s 138 s 553 s 830 s 138 s
Pump-down
time for vac-
uum cham-
ber size 100 l 5532 s 8295 s 1382 s 5532 s 8295 s 1382 s
Technical data and dimensions
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