Pfeiffer Vacuum HICUBE ECO, Руководство по эксплуатации

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6.5.1 Operating mode display via LED 33
6.5.2 Temperature monitoring 34
6.6 Switching off and venting 34
6.6.1 Switching off the turbo pumping station 34
6.6.2 Venting 34
7 Maintenance 36
7.1 General maintenance information 36
7.2 Maintenance intervals and responsibilities 36
7.3 Removal of components for their maintenance 36
7.3.1 Dismantling connections 37
7.3.2 Removing the turbopump 37
8 Decommissioning 39
8.1 Shutting down for longer periods 39
8.2 Recommissioning 39
8.3 Disposal 39
9 Malfunctions 40
9.1 General 40
9.2 Troubleshooting 40
9.3 Error codes 40
10 Service solutions from Pfeiffer Vacuum 44
11 Accessories 46
12 Technical data and dimensions 47
12.1 General 47
12.2 Technical Data 47
12.3 Dimensioned drawings 52
Declaration of Conformity 55
Table of contents
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