Pfeiffer Vacuum HICUBE ECO, Руководство по эксплуатации

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5.3 Connecting the high vacuum side
5.3.1 Requirements for the design of the counterflange
NOTICE
Danger of property damage due to an incorrect counter flange design
Unevennesses of the customers counter flange result in distortion in the pump housing even when
correctly affixed. The result is leaks or negative changes in the running properties.
► Observe the shape tolerances for the counter flange.
► Observe the maximum deviations in evenness across the entire surface.
The assembly of attachments onto the HiCube Eco turbo pumping station is the re-
sponsibility of the operator. The load capacity of the high vacuum flange is specific
to the turbopump being used. The total weight of attachments onto the HiCube Eco
turbo pumping station is not permitted to exceed the specified maximum values.
If the rotor is suddenly blocked, the torques arising from the system and the high vacuum flange must
be absorbed. The installation elements for turbopumps are special designs of Pfeiffer Vacuum.
Turbo pumping
station Maximum
torque oc­
curring in
the event of
a burst
2)
Permissi­
ble total
weight of
attach­
ments on
the pump­
ing station Form toler­
ance Tensile
strength of the
flange materi­
al in all oper­
ating condi­
tions Screw­in
depth of
the fas­
tening
bolts Maximum
permissi­
ble sur­
rounding
magnetic
field Maximum
permissi­
ble irradi­
ated ther­
mal out­
put
HiCube 500 Nm 50 kg ± 0.05 mm
170 N/mm
2 2.5 x d 3 mT 1.2 W
HiCube 80 Eco 620 Nm 3.3 mT 0.9 W
HiCube 300 Eco 2000 Nm 5.5 mT 2.4 W
270 N/mm 2
1.5 x d
Tbl. 4: Requirements for the design of the high vacuum connection at the customer's site
► Only use the approved mounting kits from Pfeiffer Vacuum for the high vacuum connection of the
turbopump.
5.3.2 Using accessories for the high vacuum connection
Installation and operation of accessories
Pfeiffer Vacuum offers a range of specially coordinated accessories for its products.
The installation, operation and maintenance of connected devices are described in
detail in the operating manuals of the individual components.
● Information on approved accessories can be found at
pfeiffer-vacuum.com .
Using a splinter shield or protective screen
Pfeiffer Vacuum centering rings with splinter shield or protective screen in the high vacuum flange pro-
tect the turbopump against foreign bodies from the vacuum chamber. The volume flow rate of the pump
reduces according to the flow conductance values and the size of the high vacuum flange.
Flange size Reduced pumping speed in % for gas type
H
2
He N
2
Ar
Splinter shield DN 40 6 9 17 18
2) The theoretically calculated torque in the event of a burst (rotor shaft breakage) according
to ISO 27892 was not reached in any experimental test.
Installation
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