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Declaration of Conformity

We hereby declare that the product cited below satisfies all relevant provisions of the follow-
ing EC Directives:

●

Machinery 006/42/EC (Appendix II, No. 1 A)

●

Electromagnetic Compatibility 2014/30/EU

●

Restriction in the use of certain hazardous substances 2011/65/EU

Authority for compiling the technical documents rests with Mr. Helmut Bernhardt, Pfeiff-
er Vacuum GmbH, Berliner Straße 43, 35614 Aßlar.

Turbo pumping station
HiCube Eco

Harmonized standards and national standards and specifications which have been
applied:

DIN EN ISO 12100:2011

DIN EN 1012-2:2011

DIN EN 61000-3-2:2014

DIN EN 61000-3-3:2014

DIN EN 61010-1:2010

DIN EN 61326-1:2013

DIN EN 62061:2013

Signature:

Pfeiffer Vacuum GmbH
Berliner Straße 43
35.614 Asslar
Germany

(Dr. Ulrich von Hülsen)
Managing Director

9/10/2016

Содержание HICUBE ECO

Страница 1: ...OPERATING INSTRUCTIONS EN Translation of the Original HICUBE ECO Turbo pumping stations...

Страница 2: ...PT0553BEN_C PT0553 2017 08 03...

Страница 3: ...station 19 5 2 1 Grounding the pumping station 20 5 2 2 Anchor the pumping station only applies to HiCube 300 Eco 20 5 3 Connecting the high vacuum side 21 5 3 1 Requirements for the design of the co...

Страница 4: ...omponents for their maintenance 36 7 3 1 Dismantling connections 37 7 3 2 Removing the turbopump 37 8 Decommissioning 39 8 1 Shutting down for longer periods 39 8 2 Recommissioning 39 8 3 Disposal 39...

Страница 5: ...pumping speed classes HiCube 30 Eco HiCube 80 Eco HiCube 300 Eco 1 2 Target group These operating instructions are aimed at all persons performing the following activities on the product transport set...

Страница 6: ...s used in the document 1 3 2 Pictographs Pictographs used in the document indicate useful information Note Tip Example 1 3 3 Stickers on the product This section describes all existing stickers on the...

Страница 7: ...structions in the text Usage instructions in the document follow a general structure that is complete in itself The required ac tion is indicated by an individual or by multiple action steps Individua...

Страница 8: ...ment 2 2 Safety instructions All safety instructions in this document are based on results from the risk assessment in accordance with Machine Directive 2006 42 EC AG Appendix I and EN ISO 12100 chapt...

Страница 9: ...th toxic media there is a risk of injury and danger of death due to poisoning Note the corresponding regulations for handling toxic substances Toxic process gases should be safely conveyed away via an...

Страница 10: ...During maintenance work there is a health risk due to contact with these poisonous substances The non permitted disposal of toxic substances results in environmental damage Take appropriate safety pre...

Страница 11: ...ions Information requirement on possible hazards The owner or operator of the product is required to make all operating personnel aware of hazards arising from the use of this product Every person who...

Страница 12: ...peration of the turbopump at higher ambient temperatures as well If the maximum permissible operating temperature of the turbopump is excee ded the electronic drive unit first reduces the drive output...

Страница 13: ...diation Operation in explosion hazard areas Use in systems in which impact loads and vibrations or periodic forces are exerted on the equip ment Use of accessories or spare parts that are not describe...

Страница 14: ...essed handle 3 Protective cover 2 Installation base Notes on safe transportation without packaging For transport without packaging the HiCube Eco turbo pumping stations are equipped with recessed hand...

Страница 15: ...the original protective covers 2 Seal other connections e g exhaust with appropriate protective covers 3 Only store the turbo pumping station in indoor areas at temperatures between 10 C and 40 C 4 In...

Страница 16: ...pany ID no 000021320 Fig 2 HiCube Eco pump configuration Characteristics HiCube Eco Operating manual HV flange DN 40 DN 63 DN 100 Turbopump HiPace 30 HiPace 80 HiPace 300 HiPace 300 H PT 0510 BN PT 02...

Страница 17: ...g unit with a turbo pump and a specially match ed backing pump Fig 3 HiCube Eco construction 1 Display and control unit DCU 002 8 Turbopump HiPace 80 DN 63 ISO K 2 Retaining hook only with HiCube 300...

Страница 18: ...backing pump 4 2 3 Cooling Air cooling Water cooling optional At excessively high temperatures the electronic drive unit automatically reduces the drive power 4 3 Scope of delivery HiCube Eco Protect...

Страница 19: ...0 C Choosing the installation location 1 Ensure adequate cooling options for the pumping station 2 Install suitable protective shielding if ambient magnetic fields occur that are higher than the maxi...

Страница 20: ...ng of the turbopump rotor the resulting torque must be taken up via the pumping station frame by the fixture provided by customer Anchoring the pumping station is mandatory in order to secure the pump...

Страница 21: ...ing bolts Maximum permissi ble sur rounding magnetic field Maximum permissi ble irradi ated ther mal out put HiCube 500 Nm 50 kg 0 05 mm 170 N mm2 2 5 x d 3 mT 1 2 W HiCube 80 Eco 620 Nm 3 3 mT 0 9 W...

Страница 22: ...s arising 2 Please contact Pfeiffer Vacuum before installing a vibration damper 1 Only install a vibration damper with a vertical passage 2 Take account of the flow resistance 3 Secure the turbo pump...

Страница 23: ...connection using bracket screws 1 Only use the approved fastening sets from Pfeiffer Vacuum for the connection 2 Connect the flange according to the diagram using the components in the mounting kit 3...

Страница 24: ...rbopump 6 Screw the hexagonal screws into the threaded holes Observe the minimum tensile strength of the flange material and the screw in depth 7 Tighten the hexagonal screws in three stages in opposi...

Страница 25: ...ks may occur due to the incorrect installation of CF flanges Inadequate cleanliness when handling CF flanges and copper seals results in leaks and may cause process damage Always wear suitable gloves...

Страница 26: ...r the connection 2 If used Insert the protective screen or splinter shield with the clamping lugs pointing downward into the high vacuum flange 3 Place the seal precisely in the hollow 4 Connect the f...

Страница 27: ...alling an exhaust line 1 Choose an exhaust line cross section of at least the size of the exhaust connection on the backing pump 2 Unscrew the exhaust silencer from the backing pump 3 Lay the pipeline...

Страница 28: ...5 6 Connecting accessories for the pumping station Installation and operation of accessories Pfeiffer Vacuum offers a range of specially coordinated accessories for its products The installation opera...

Страница 29: ...uts on the transport retainer as far as they will go 2 Also unfasten the transport retainer on the opposite side 5 8 Connecting to the mains power supply WARNING Danger of death from electric shock du...

Страница 30: ...ction to the protective conductor PE 3 Plug the mains cable provided into the connecting socket on the side of the pumping station hous ing 4 Connect the mains cable to the mains supply at the operato...

Страница 31: ...umping station P 025 Op Mode BKP Backing pump mode 1 Intermittent operation 1 Intermittent operation 1 Intermittent operation P 035 Cfg Acc A1 Configuration accessory con nection A1 Air cooling 4 Fan...

Страница 32: ...DCU 002 display and control unit observe the corresponding op erating manual supplied Key Parameter use Description corresponds to 010 0 or 1 Pumping station ON OFF All components are put into out of...

Страница 33: ...on 3 Scroll through the entire first parameter set to 030 ValveMode 4 Press both buttons simultaneously This will open editing mode 5 Select the option 2 open 6 Press both buttons simultaneously This...

Страница 34: ...e 75 C of the backing pump the motor speed is reduced to nominal rotation speed to prevent the pump overheating After cooling down 72 C the pump begins to run again at the set rotation speed 6 6 Switc...

Страница 35: ...nterrupted Venting speed P 720 Venting duration P 721 Venting duration on power fail ure 50 of the nominal rotation speed 3600 s 3600 s Tbl 9 Factory settings for delayed venting with turbopumps Switc...

Страница 36: ...the required maintenance on the components of the pumping station in accordance with the instructions in the individual operating manuals 2 Clean the pumping station externally with a lint free cloth...

Страница 37: ...i functional connection X3 1 Remove the connector from the multi functional connection on the electronic drive unit of the tur bopump 2 Unfasten and remove the accessories control cables from the conn...

Страница 38: ...ubsequent assembly 10 Nm 4 Remove the entire turbopump with mounting plate from the frame The opening in the mounting plate makes it easy for customers to perform mainte nance work on the turbopump e...

Страница 39: ...ure for recommissioning the pumping station 1 Check the pumping station for contamination and humidity 2 Clean the pumping station externally with a lint free cloth cloth and a little industrial alcoh...

Страница 40: ...tage Electronic drive unit defective 1 Replace the electronic drive unit according to the operating instructions for the turbopump 2 Inform Pfeiffer Vacuum Service Pump not achieving the re quired fin...

Страница 41: ...o pump faulty Check connections Only acknowledge for rotational speed f 0 E010 Internal device error Call Pfeiffer Vacuum Service Only acknowledge for rotational speed f 0 E021 Drive electronics fail...

Страница 42: ...range between 5 C and 85 C Check deployment conditions Call Pfeiffer Vacuum Service F007 Undervoltage mains failure Mains failure Check power supply F018 Authorization level conflict Pumping station s...

Страница 43: ...e speed too high venting rate too high Check and adjust venting rate on pump specific basis Tbl 12 Error and warning messages for the drive electronics of the turbopump Display Problem Possible causes...

Страница 44: ...us options for upholding your equipment availability Detailed information and addresses can be found on our website in the Pfeiff er Vacuum Service section Advice on the optimum solution is available...

Страница 45: ...ntainers e Observe the valid transport conditions ERKL RUNG KONTAMINIERUNG 6 Affix the declaration of contamination to the outside of the packaging 7 Then send your product to your local Service Cente...

Страница 46: ...11 Accessories Please note the lists of accessories for the individual components in the corre sponding operating manuals or online at pfeiffer vacuum com Accessories 46 56...

Страница 47: ...ntegral leakage rate with helium concentration 100 measuring period 10 s Sound pressure level at distance from pump 1 m mbar bar Pa hPa kPa Torr mm Hg mbar 1 1 10 3 100 1 0 1 0 75 bar 1000 1 1 105 100...

Страница 48: ...pump MVP 015 2 MVP 015 4 MVP 030 3 Ultimate pressure 1 10 8 hPa 1 10 8 hPa 1 10 8 hPa Pumping speed for N2 32 l s 32 l s 32 l s Pumping speed backing pump at 50 Hz 1 m h 0 75 m h 1 8 m h Pump down tim...

Страница 49: ...r N2 35 l s 35 l s 35 l s Pumping speed backing pump at 50 Hz 1 m h 0 75 m h 1 8 m h Pump down time for vacuum chamber size 1 l 56 s 83 s 14 s Pump down time for vacuum chamber size 10 l 557 s 834 s 1...

Страница 50: ...size 10 l 557 s 834 s 143 s Pump down time for vacuum chamber size 100 l 5572 s 8335 s 1428 s Mains requirement voltage 100 240 V 100 240 V 100 240 V Mains requirement frequency range 50 60 Hz 50 60...

Страница 51: ...300 Eco HiCube 300 Eco HiCube 300 Eco HiCube 300 Eco HiCube 300 Eco HiCube 300 Eco Flange in DN 100 ISO K DN 100 ISO K DN 100 ISO K DN 100 ISO K DN 100 ISO K DN 100 ISO K Flange out Silencer G 1 8 Sil...

Страница 52: ...e hu midity of air 5 85 non condensing 5 85 non condensing 5 85 non condensing 5 85 non condensing 5 85 non condensing 5 85 non condensing Weight 15 9 kg 17 6 kg 17 5 kg 15 9 kg 17 6 kg 17 5 kg Tbl 23...

Страница 53: ...Fig 17 Dimensions of HiCube 30 Eco DN 63 ISO K Fig 18 Dimensions of HiCube 80 Eco DN 40 ISO KF Fig 19 Dimensions of HiCube 80 Eco DN 63 CF F Technical data and dimensions 53 56...

Страница 54: ...Fig 20 Dimensions of HiCube 80 Eco DN 63 ISO K Fig 21 Dimensions of HiCube 300 Eco DN 100 CF F Fig 22 Dimensions of HiCube 300 Eco DN 100 ISO K Technical data and dimensions 54 56...

Страница 55: ...ompiling the technical documents rests with Mr Helmut Bernhardt Pfeiff er Vacuum GmbH Berliner Stra e 43 35614 A lar Turbo pumping station HiCube Eco Harmonized standards and national standards and sp...

Страница 56: ...PT0553 ed C Date 1708 P N PT0553BEN...

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