3-2
Section 3
Setting Value Obtaining and Changing Command
ZS Series
CompoWay/F Communication Command Reference
Section 3
Unit No.
and P
a
rameter No.
Measurement Result Obtaining Command
■
Parameter List
When selecting a mode other than “THICK/GAP - FILM/OTHERS - TRANSFER" mode
(when no 2-area measurement is performed):
Unit No.
Data No.
Parameter Description
30h
20h
Measurement result (=Main digital display value)
When selecting “THICK/GAP - FILM/OTHERS - TRANSFER" mode
(when a 2-area measurement is performed):
Unit No.
Data No.
Parameter
30h
20h
Area 1 displacement value (TASK1)
44h
20h
Area 2 displacement value (TASK2)
58h 20h
Thickness and/or Gap results
(=Main digital display value = TASK3 = Area1 – Area2)
■
Parameter List (ZS-MDC)
Unit No.
Data No.
Parameter
30h
20h
TASK1 measurement result
44h
20h
TASK2 measurement result
58h
20h
TASK3 measurement result
6Ch
20h
TASK4 measurement result
Example1:
When obtaining a measurement result of ZS-LDC (2CH) (and when no 2-area
measurement is performed):
02h 01h (C000h + 20h (Data No.)) 30h (Unit No.) 02h (CH No.) (8000h + 1h (Number of elements))
In the command section, the value is shown as below:
02h 01h C020h 3002h 8001h
To this command, if the response is shown as below:
02h 01h C020h 3002h 8001h 04CC5520h
It indicates as 80500000nm (= 80.5mm) because 04CC5520h = 80500000.
Example2: When obtaining a displacement value of a standalone ZS-LDC (0CH) Area2 (and a
2-area measurement is performed):
02h 01h (C000h + 20h (Data No.)) 44h (Unit No.) 00h (CH No.) (8000h + 1h (Number of elements))
In the command section, the value is shown as below:
02h 01h C020h 4400h 8001h
To this command, if the response is shown as below:
02h 01h C020h 4400h 8001h 02719C40h
It indicates as 41000000nm (= 41mm) because 02719C40h = 41000000.
Measurement Result Obtaining Command