OAI 200 Series, Руководство по эксплуатации

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A wide variety of alignment optics is available including stereo zoom, compound, split
field microscopes and CCTV systems. This variety allows the user to choose a system,
which is best, suited to his specific needs.
The microscope is moved from its home position to the alignment position by use of the
handle on the sliding base located at the far right side of the aligner. The alignment
module is moved in the "X" direction and the microscope is moved in the "Y" direction to
position alignment structures in the field of view.
Adjustments are provided to level the microscope to the photomask so that it is in focus
across the entire photomask.
A fine focus adjustment is provided to insure the sharpest possible image during
alignment.
Operating Controls
All operator controls are mounted on the front of the aligner. They are clearly labeled to
identify their function.