Страница 1: ...OPERATION MANUAL Model 200 MASK ALIGNER TABLE TOP SERIES 685 RIVER OAKS PARKWAY SAN JOSE CA 95134 www oainet com sales oainet com 408 232 0600 P N 0200 750 01 Rev B 05 29 01...
Страница 2: ...uctions 8 Alignment Module 8 Light Source 8 Installing the microscope 9 Installing the Constant Intensity Controller 9 Preparing the Console 9 Section 4 Operating Instructions 10 Controls and Indicato...
Страница 3: ...r supervised by personnel trained on the Series 200 Mask Alignment and Exposure System Equipment that in OAI s sole opinion has been misused abused incorrectly operated improperly connected to a power...
Страница 4: ...ect shipments or to impose a service charge in addition to all C O D costs 3 Repairs and calibration services other than warranty available at prevailing OAI rates In such cases the buyer shall pay tr...
Страница 5: ...omponents The Alignment Module The alignment module has a sturdy mask frame which is always in three point contact with the alignment module casting during exposure to insure that the mask is perpendi...
Страница 6: ...tes for lamp aging and power variations as great as 15 VAC The CIC uses a closed loop feedback control system having two sensors each tuned to a user selected wavelength When in the Constant Intensity...
Страница 7: ...ted at the far right side of the aligner The alignment module is moved in the X direction and the microscope is moved in the Y direction to position alignment structures in the field of view Adjustmen...
Страница 8: ...e 1 4 20 mounting bolts There are two at the back of the module and one at the front They provide adjustment to level the alignment module in X and Y and can be adjusted from underneath the frame Ligh...
Страница 9: ...the Constant Intensity Controller 1 Remove the Constant Intensity Controller from its packing 2 Connect the cables as shown in Figure 1 and the instructions in the Constant Intensity Controller manual...
Страница 10: ...he mask frame The substrate may now be placed on the substrate holder assembly vacuum chuck Placing the Substrate on the Vacuum Chuck and Alignment 1 Place the substrate on the vacuum chuck using the...
Страница 11: ...ller mask to substrate separation which will allow the use of higher magnification optics during alignment 7 Align the substrate to the mask using the following procedure A Align the substrate alignme...
Страница 12: ...e the contact between the mask and substrate 4 When you are satisfied with the contact move the alignment optics to the rear and the alignment module to the expose position far left under the light so...
Страница 13: ...oving it forward Using the small X Y stage for the final alignment 4 Focus on one side of the photomask with the highest magnification available and move the microscope to the other side of the mask I...
Страница 14: ...ing chuck level release valve Vacuum chuck vibrates when the chuck release is on Excessive air going to vacuum air bearing cup Adjust airflow using chuck level release valve Short lamp life lamp explo...
Страница 15: ...Pivoting 1 5 Light Source Lenses 5 or 7 diameter or 10 truncated for 6 x 6 substrates Schott BK 7 or fused silica Power ratings watts Near UV 200 350 500 1000 Watts Deep UV 500 1000 Watts Constant Int...
Страница 16: ...9 monitors Single CCTV system with 1 12 monitor Note Virtually any microscopes can be mounted to the Series 200 for use as an optical alignment system OAI will provide any system the customer chooses...
Страница 17: ...MODEL 200 FIGURES Figure 1 Electrical Interconnection Diagram Signal Cable HV Cable VAC CDA N2 Figure 2 Rear Panel Connections 17...
Страница 18: ...s in 0 1 second intervals Lamp Test Opens shutter with no timer Use Reset to close shutter Timer Power ON OFF for the timer and system Chuck Z Adjust Clutch current for z axis Mask Vac Mask vacuum ON...
Страница 19: ...19 SECTION 7 DRAWINGS SCHEMATICS PART NUMBER DESCRIPTION REV PGS 0200 101 01 DIAG PNEU PIPING INSTRUMEN MDL 200 D 1 0200 102 01 DIAG WIRING SYS CFG MDL 200 L 1...
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Страница 21: ...OSCOPE HOME NO 18 BLK WHT C 22 RED NC 18 VIO 18 VIO 0200 051 01 BACK OF TOOLING CLUTCH ARM INSIDE TOOLING 18GRN YEL 22 BRN 22 BRN 22 BRN 22WHT VIO 22VIO 22ORG 0200 054 01 9257 MAKE REDLINE CHANGES 02...
