OAI 200 Series, Руководство по эксплуатации

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SECTION 5:
ALIGNING THE MICROSCOPE TO
THE ALIGNMENT MODULE
1.
Insure that the microscope objectives will not hit the mask frame when the
microscope moves to the align position. To check, turn OFF the air supply and
move the microscope by hand toward the mask frame. Adjust the height of the
microscope as required according to the microscope installation instructions in
section 3. When the height is properly adjusted turn the air back ON.
2.
With the microscope and light source in the load/unload position and the mask
frame closed, place as mask on the mask frame and secure it in place with the
mask clamp.
3.
Place the Align Optics over the mask by releasing the vacuum hold and moving it
forward. Using the small X-Y stage for the final alignment.
4.
Focus on one side of the photomask with the highest magnification available and
move the microscope to the other side of the mask. If the mask is not in focus use
the two rear mounting bolts of the alignment module to bring the mask into focus.
Repeat the procedure until the mask remains in focus as the microscope is scanned
left and right WITHOUT ADJUSTING THE FOCUS OF THE MICROSCOPE.
5.
Move the microscope to the front of the alignment module and focus on the mask.
Repeat the same procedure as in 4 above except move the microscope from front
to rear and adjust the rear mounting bolts to level the alignment module from front
to rear. Be careful to turn both nuts the same amount in order to maintain the left
to right leveling.
6.
Check leveling again from side to side and make minor adjustments as required.