OAI 200 Series Скачать руководство пользователя страница 21

5

5

4

4

3

3

2

2

1

1

D

D

C

C

B

B

A

A

(-)

(+)

18 GRY

Z MOTION
CLUTCH
CONTROLLER

Z MOTION

CLUTCH

POWER

SUPPLY

2

5

7

4

PS1

A

6692

PRODUCTION RELEASE

CTEX

1/6/99

B

8006

REVISED PER ECO

REVISED PER ECO

TW

SGOH

5/3/01

8/23/01

C

7959

NC

NO

C

MICROSCOPE ALIGN

TOOLING LOAD

ON

ON

ON

ON

POWER SWITCH
   ON/OFF
(0200-005-01)

ON

115/230V
50/60 HZ

18BLK

18WHT

18BLK

18BLK

18BLK

18WHT

18WHT

18WHT

TOOLING
 CLUTCH

BLK

BLK

(-)

(+)

ON

ON

MASK UP/DOWN
   SWITCH

ON

MASK
UP/DOWN

PART OF TOOLING

18BLK

18BLK

18BLK

18BLK

18BLK

FRONT PANEL

18 BLK/WHT

18 BLK/WHT

18 BLK/WHT

18 RED

18 RED

18 BLK/WHT

18 VIO

18 VIO

22 BRN

22 RED

22 RED

3 GND SCREWS 
ON BACK PANEL

REF - TO L/S GND

AUTO TRIGGER
0401-081-01

BACK PANEL

18 GRN/YEL

18 GRN/YEL

18 LT BLU

IR ILLUMINATOR
CONTROLLER

(OPTIONAL)

310mm  SILICONE WIRE

310mm  SILICONE WIRE

310mm  SILICONE WIRE

310mm  SILICONE WIRE

18G 2COND

18GRY
18ORG/WHT

WHT

WHT

AUX KEYBOARD
0150-018-01

VIO

YEL

FRONT PANEL

BRN

ORG

J7

6000-068-01

BLU

0200-004-01

DIGITAL SWITCH BOARD
0140-012-01

GRY

BLU

ORG

BRN

14 WIRE RIBBON CABLE

YEL

GRY

RIBBON CABLE

VIO

TIMER BOARD
0150-011-02

GRN

RED

RED

J15

GRN

WHT

FRONT PANEL

E

B

C

IR OPTION

J18

J19

TO SHUTTER

18 LT BLU

18BLK

18BLK

18BLK

18BLK

18 LT BLU

18 LT BLU

22 BRN

22 RED

18BLK

18BLK

18RED

18YEL

18RED

18RED

18RED

22 RED

22 RED

20 RED

20 RED

18YEL

18BRN

18BRN

18BRN

18BRN

18BRN

22 BRN

22 BRN

22 BRN

22 BRN

22 BRN

22 BRN

22BRN

18ORG

18ORG

18BLU

18BLU

20 ORG

20 ORG

20 BLK

22 BLK

20BLK

18BLK

18 GRN/YEL

18 GRN/YEL

18BLK

18 GRN/YEL

18VIO

22VIO

18VIO

18VIO

22VIO

18VIO

22VIO

22VIO

18GRY

18GRY

18GRY

18ORG/WHT

18ORG/WHT

18ORG/WHT

18ORG/WHT

18ORG/WHT

BLK

22ORG

22ORG

22YEL

22YEL

22VIO

22BLU

22BLU

22GRY

22GRY

22WHT/VIO

22WHT/VIO

18 GRN/YEL

RED

22WHT/ORG

22 BLK

22VIO

22GRY

1 WRAP WHITE ELECTRICAL TAPE (OR) WHT SHRINK TUBING ON WIRE APPROXIMATELY

WHERE SHOWN.

NOTES:

1

1

1

18 LT BLU

1

2

THIS JUMPER IS REMOVED WHEN THE IR OPTION IS ADDED TO THE MACHINE.

D

8603

ADD IR OPTION

MM

MM

2/3/03

18GRY

18GRY

18GRY

18GRY

18GRY

18ORG/WHT

18ORG/WHT

E

8904

ADD S8,J22B,P22B

MM

MM

7/28/04

NC

NC

NO

NO

COM

COM

IR LAMP EXTEND

F

ADD J23,P23, & S9

MM

MM

ENABLE

DISABLE

22 BRN

22 BRN

22 RED/WHT

22 RED/WHT

OPTICS XY STAGE

ON FRONT PANEL

8940

10/07/04

18BLK

L

D

B

BACK PANEL

F

LINE
FILTER
+ FUSE

LF1

18 LT BLU

E

C

J

GND LUG

18BLK

A

N

18BLK

18 GRN/YEL

18 GRN/YEL

18 GRN/YEL

18 GRN/YEL

28V
30VA

1

2

20BLK

22BLK

20BLK

REF - TO POWER 
DISTRIBUTION BOX

COM

NC

NO

COM

NO

NC

N

N

N

N

N

N

N

N

18GRY

14GRN/YEL

MM

MM

CL1

MICROSCOPE HOME

NO

18 BLK/WHT

C

22 RED

NC

18 VIO

18 VIO

0200-051-01

BACK OF TOOLING

CLUTCH ARM

INSIDE TOOLING

18GRN/YEL

22 BRN

22 BRN

22 BRN

22WHT/VIO

22VIO

22ORG

0200-054-01

9257

MAKE REDLINE CHANGES

02/01/06

G

H

9304

ADD Z OPTION NOTE

MM

MM

22 BRN

22 RED

INSTALLED WITH THE MICROSCOPE Z OPTION (0420-0002-XX).

3

3

4

THE LAST CONNECTORS USED ARE P26 & J26 & THE LAST VALVE USED IS V5, WHICH 
BOTH ARE USED ON THE MICROSCOPE Z OPTION (0420-0002-XX).

03/13/06

I

9675

PS AC PIN WAS 2 IS 3

MZ

MZ

5/9/07

22RED

22BRN

22BRN

22BRN

5

5

INSTALLED WITH THE 12VDC SHUTTER DRIVE KIT (0200-071-01).

0200-071-01

SHUTTER DRIVE
KIT

5

5

5

6

WHEN THE 12V SHUTTER DRIVER KIT ISN'T INSTALLED, THIS WIRE RUNS FROM P16-9 TO TB1-4.

6

6

J

10341

ADD 0200-071-01

MM

MM

5/14/09

22GRN/YEL

22GRN/YEL

K

10349 ADD GND WIRE TO P16

MM

MM

6/2/09

L

MM

MM

22WHT/RED

22BRN

22BRN

22VIO

22VIO

22VIO

S10

+

-

MICROSCOPE
UP SWITCH

RED (BRN)

BLK (BLU)

22VIO

BLK

RED

ON OPTICS XY STAGE

IR Z OPTION

22 BRN

22WHT/BLU

22WHT/BLU

22WHT/YEL

22WHT/YEL

7

P26 HAS PIN 1 & PIN 2 SHORTED WHEN THERE IS NO IR Z OPTION INSTALLED. P26 IS WIRED TO
S10 WHEN THE IR Z OPTION IS INSTALLED.

7

8

ONLY INSTALLED WITH THE MICROSCOPE Z OPTION (0420-0002-01 OR 0420-0002-02).

8

ADD IR Z OPTION

9

S10 IS PART OF CYLINDER 4900-101-01.

9

10438

10/19/09

L

OAI

0200-102-01

Wednesday, October 14, 2009

1

1

D

DIAGRAM WIRING SYS CFG MDL 200

{Cage Code}

Size

Scale

CAGE Code

DWG NO

Rev

Sheet

of

MA

25 MA

M1

R1

1K

+

-

V1

4 WAY VALVE

+

-

V2

4 WAY VALVE

IR LAMP

TGND1

J11

1

2

J20

1 2

J8

1 2

P11

1

2

P10B

1 2 3 4

P20

1

2

P8

1 2

S5

S1

6A 125VAC

LP3

IR LAMP

LP4

IR LAMP

J14

1

2

S3

P16

1

2

3

4

5

6

7

8

9

PLC1

DL05_AC

L

G

N

LG

C0 X1

X2

X3

X0

C1

X4

X5

X6

X7

C2

Y0

Y1

Y2

Y3

Y4

Y5

C3

+

-

V4

3 WAY NC VALVE

RIGHT DIRECTION

+

-

V3

3 WAY NC VALVE

LEFT DIRECTION

J21

1

2

P21

1

2

P22A

1

2

3

4

J22A

1

2

3

4

J5

1

2

3

4

5

6

A

B

C

D

E

F

J2

1

2

3

4

5

6

7

8

9

J12

1 2 3 4 5 6 7 8 9

P5

1

2

3

P1

1

2

3

4

5

6

7

8

9

P3

1

2

3

4

5

6

J3

1

2

3

4

5

6

P12

1 2 3 4 5 6 7 8 9

J4

1

2

3

LP

S7

CYCLE

NC

NO

C

X2

X2

X1

C1

.47uF

R2

20K

Q1

2N3906

TB6

te

rm

inal

_bd_5X2

D1

1N4001

R3

82K

J17

1

2

3

4

P17

1

2

3

4

11

2

33

44

2

TB5

S8

P22B

1

2

3

4

J22B

1

2

3

4

Revisions

REV.

ECO No.

DESCRIPTION

ENGINEER
APPROVAL

DATE

INCORP.

BY

S9

IR LAMP EXTEND ENABLE/DISABLE SWITCH

P23

1

2

1

2

3

4

5

6

7

8

9

10

11

12

TB2

TGND2

1

2

3

4

5

6

7

8

9

10

11

12

TB1

GND STUD

T1

1

2

5

4

7

9

8

GND SCREW

11

2

33

44

2

TB7

S6

S4

P14

1

2

J10A

1 2 3 4

J10B

1 2 3 4

P10A

1 2 3 4

GND SCREW

GND SCREW

GND SCREW

J24

1

2

3

4

P24

1

2

3

4

L

N

CN1

CN2

65

43

PS2

PS-25-24

1

3

1

2

3

4

FG

2

C2

0.1UF

U1

LM340T12

1

3

2

IN

OUT

GND

J26

1

2

P26

1

2

P26

1

2

J23

1

2

+

-

V5

4 WAY VALVE

MICROSCOPE Z

J25

1

2

P25

1

2

Содержание 200 Series

Страница 1: ...OPERATION MANUAL Model 200 MASK ALIGNER TABLE TOP SERIES 685 RIVER OAKS PARKWAY SAN JOSE CA 95134 www oainet com sales oainet com 408 232 0600 P N 0200 750 01 Rev B 05 29 01...

Страница 2: ...uctions 8 Alignment Module 8 Light Source 8 Installing the microscope 9 Installing the Constant Intensity Controller 9 Preparing the Console 9 Section 4 Operating Instructions 10 Controls and Indicato...

Страница 3: ...r supervised by personnel trained on the Series 200 Mask Alignment and Exposure System Equipment that in OAI s sole opinion has been misused abused incorrectly operated improperly connected to a power...

Страница 4: ...ect shipments or to impose a service charge in addition to all C O D costs 3 Repairs and calibration services other than warranty available at prevailing OAI rates In such cases the buyer shall pay tr...

Страница 5: ...omponents The Alignment Module The alignment module has a sturdy mask frame which is always in three point contact with the alignment module casting during exposure to insure that the mask is perpendi...

Страница 6: ...tes for lamp aging and power variations as great as 15 VAC The CIC uses a closed loop feedback control system having two sensors each tuned to a user selected wavelength When in the Constant Intensity...

Страница 7: ...ted at the far right side of the aligner The alignment module is moved in the X direction and the microscope is moved in the Y direction to position alignment structures in the field of view Adjustmen...

Страница 8: ...e 1 4 20 mounting bolts There are two at the back of the module and one at the front They provide adjustment to level the alignment module in X and Y and can be adjusted from underneath the frame Ligh...

Страница 9: ...the Constant Intensity Controller 1 Remove the Constant Intensity Controller from its packing 2 Connect the cables as shown in Figure 1 and the instructions in the Constant Intensity Controller manual...

Страница 10: ...he mask frame The substrate may now be placed on the substrate holder assembly vacuum chuck Placing the Substrate on the Vacuum Chuck and Alignment 1 Place the substrate on the vacuum chuck using the...

Страница 11: ...ller mask to substrate separation which will allow the use of higher magnification optics during alignment 7 Align the substrate to the mask using the following procedure A Align the substrate alignme...

Страница 12: ...e the contact between the mask and substrate 4 When you are satisfied with the contact move the alignment optics to the rear and the alignment module to the expose position far left under the light so...

Страница 13: ...oving it forward Using the small X Y stage for the final alignment 4 Focus on one side of the photomask with the highest magnification available and move the microscope to the other side of the mask I...

Страница 14: ...ing chuck level release valve Vacuum chuck vibrates when the chuck release is on Excessive air going to vacuum air bearing cup Adjust airflow using chuck level release valve Short lamp life lamp explo...

Страница 15: ...Pivoting 1 5 Light Source Lenses 5 or 7 diameter or 10 truncated for 6 x 6 substrates Schott BK 7 or fused silica Power ratings watts Near UV 200 350 500 1000 Watts Deep UV 500 1000 Watts Constant Int...

Страница 16: ...9 monitors Single CCTV system with 1 12 monitor Note Virtually any microscopes can be mounted to the Series 200 for use as an optical alignment system OAI will provide any system the customer chooses...

Страница 17: ...MODEL 200 FIGURES Figure 1 Electrical Interconnection Diagram Signal Cable HV Cable VAC CDA N2 Figure 2 Rear Panel Connections 17...

Страница 18: ...s in 0 1 second intervals Lamp Test Opens shutter with no timer Use Reset to close shutter Timer Power ON OFF for the timer and system Chuck Z Adjust Clutch current for z axis Mask Vac Mask vacuum ON...

Страница 19: ...19 SECTION 7 DRAWINGS SCHEMATICS PART NUMBER DESCRIPTION REV PGS 0200 101 01 DIAG PNEU PIPING INSTRUMEN MDL 200 D 1 0200 102 01 DIAG WIRING SYS CFG MDL 200 L 1...

Страница 20: ......

Страница 21: ...OSCOPE HOME NO 18 BLK WHT C 22 RED NC 18 VIO 18 VIO 0200 051 01 BACK OF TOOLING CLUTCH ARM INSIDE TOOLING 18GRN YEL 22 BRN 22 BRN 22 BRN 22WHT VIO 22VIO 22ORG 0200 054 01 9257 MAKE REDLINE CHANGES 02...

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