OAI 200 Series, Руководство по эксплуатации

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Figure 3. Controls and Indicators
SWITCH/ADJUSTMENT FUNCTION
Seconds Exposure time in seconds or tenths of
seconds.
Expose Can be used to expose at time set on
timer.
Reset Causes the shutter to close immediately.
1000 Sec Sets timer for 0-1000 seconds in 1 second
intervals.
100 Sec Sets timer for 0-100 seconds in 0.1 second
intervals.
Lamp Test Opens shutter with no timer. Use Reset to
close shutter.
Timer Power ON/OFF for the timer and system.
Chuck “Z” Adjust Clutch current for z-axis.
Mask Vac. Mask vacuum ON/OFF.
Ball Vac. Ball vacuum ON/OFF.
Sub. Vac. Substrate vacuum ON/OFF.
Contact Vac. Adjust Contact vacuum adjustment.
Contact Vac. Contact vacuum ON/OFF.
N2 Purge Nitrogen purge ON/OFF.
N2 Flow Adjust Nitrogen flow adjust.
Mask Frame Switch is on front of alignment module and
causes the mask frame to raise or lower.
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