Newport IPV, Руководство по установке

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iii
Table of Contents
Warranty ............................................................................................................... ii
List of Figures ..................................................................................................... iv
Specifications ....................................................................................................... v
Section 1 — General Information .....................................................................1
1.1 Introduction ............................................................................................1
1.2 Getting Started ........................................................................................1
1.3 Unpacking and Inspection .....................................................................1
1.4 Safety Considerations ............................................................................1
1.5 Table Placement .....................................................................................3
1.6 Air Supply Requirements ......................................................................3
1.7 Warranty Information ............................................................................4
1.8 Options and Accessories .......................................................................5
Section 2 — Assembly .........................................................................................6
2.1 Assembling the System ..........................................................................6
2.1.1 Table Installation Assistance .................................................... 6
2.1.2 Positioning the Isolators ............................................................ 6
2.1.3 Installing Table Top .................................................................... 7
2.2 Leveling the Table ................................................................................. 8
2.3 Isolating the Table Top ..........................................................................9
2.3.1 Installing Leveling Valves .......................................................... 9
2.3.2 Connecting Air Lines ................................................................ 11
2.3.3 Adjusting Leveling Valve Sensors ........................................... 14
2.4 Installing Tables with the Doubler Interface ................................... 15
Section 3 — Operation ..................................................................................... 17
3.1 Principles of Operation ...................................................................... 17
3.2 Performance Adjustments ................................................................. 17
3.3 Maintenance ......................................................................................... 18
3.3.1 Cleaning ...................................................................................... 18
3.3.2 Air Quality .................................................................................. 18
3.3.3 Spare Parts ................................................................................. 19
Section 4 — Troubleshooting ......................................................................... 20
4.1 Table Top Does Not Float ................................................................... 20
4.2 Poor Isolation Performance ............................................................... 20
4.3 Table Top Oscillates ............................................................................ 20
4.4 System Leaks Air Constantly ............................................................. 20
4.5 Oil Leaking From Isolator ................................................................... 21
4.6 Adding Damping Oil ............................................................................ 21
Section 5 — Factory Service ........................................................................... 22
5.1 Obtaining Factory Service .................................................................. 22
5.2 Service Form ........................................................................................ 23