Newport IPV, Руководство по установке

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9
2.3.1 Installing Leveling Valves
The IPV leveling valve is shown in Figure 2.5. Three valves are used in all
systems, regardless of the number of isolators, as only three points are
required to determine a plane. The leveling valve locations are selected
such that they form the largest triangle possible under the table. The larger
the triangle, the more stable the system will be. When two or more isolators
are controlled by the same valve, they act as a single large isolator support-
ing the table at the center of force of the several isolators. The floating
height of the system is determined at the valve position. Therefore, ideally,
the valves should be located at the center of force of the isolators they
control. In practice, however, simply grouping the isolators and their
control valves is sufficient. The groups of isolators and their valves act as
three legs for the system. The center of gravity of the combined table and
payload must be within the triangle formed by the centers of force of the
isolator groups for the system to float. Figure 2.8 shows valve and isolator
arrangements for rectangular tables. Complex table shapes require isolator
and valve layouts designed specifically for each application.
GAGE
EXH
OUT
Pivot Clamp
Screw
Table Height Sensor
Adjustment Screw
Control Arm
Adjustment Screw
(Preset at Factory)
Pressure
Relief Valve
Exhaust
Air
Supply
Metering
Needle Valve
Barb Fitting
Factory Sealed —
Do Not Remove
Mounting Screws (2)
Washers (2)
Nut Plate
Mounting Bracket
OUT
Control Arm
Assy
Figure 2.5 — IPV Leveling Valve
Isolating the
Table Top
2.3