Newport IPV, Руководство по установке

Страница: 53 / 65

14
D. Check all connections for leaks. Correct or repair any leaks before
proceeding.
E. If the table does not float within several minutes, increase the air
pressure until the table floats or adjust the value height sensors to
hold the control arms further down. Confirm that the needle valves
are open
1 ⁄
2
turn per isolator supplied.
NOTE: If the table oscillates after it floats, decrease the air pressure
or close the needle valves slightly.
F. In clean room applications the “EXH” (exhaust) port on the valves
may be connected to the clean room vacuum system to capture the
valve exhaust. Order Newport kit #CE-1.
NOTE: Exhaust must be routed to a vacuum system. Backpressure in
the tubing will cause the exhaust air to leak from the valve.
2.3.3 Adjusting Leveling Valve Sensors
A. After the table floats, check the position of the centering guide and
flange of all isolators (Figure 2.11). The gap between the guide and
flange should be
1
⁄
4
"
±
1
⁄
16
" (6mm
±
1.5mm).
B. Adjust the Table Height sensor screw of each isolator (Figure 2.5) as
required to obtain this gap. When all isolators are adjusted, re-check
the level of the table. NOTE: this step should require only minor
adjustments. Do not move the small set screw near the pivot of the
valve control arm.
C. If the table is no longer level, you may have to remove the air pressure
and re-adjust the height of the isolator support plates as described in
Section 2.2.
D. Verify that the table is freely floating on the isolators. Move the table
gently from side-to-side about
1
⁄
8
". You should not encounter any
resistance. Re-check by moving the table up and down the same
amount. Again, there should be no restriction of movement.
E. Push one corner of the table down approximately
1
⁄
8
" and release it.
The table should return to the original position within less than 4
seconds. Response time may be adjusted as described in Section 3.2.
Support Plate
Centering Disk
Centering
Guide
1/4"
±
1/16"
Figure 2.11 — Floating Height Adjustment