
HPQ2-IP SP101009.102 – 10 October 2012
MKS Instruments, Spectra Products
38
9. Ion Source Parameters
The following table gives the default ion source settings for HPQ2-IP in its three
operating modes.
Instrument
& Mode
ION SOURCE PARAMETER
Emission
Electron
Energy
Ion Energy
Extractor
HPQ2-IP RGA
Mode
0.7mA or
0.39mA
70eV
7.0eV
-110V
HPQ2-IP HP
Mode
0.1mA
35eV
5.0eV
-58V
HPQ2-IP Leak
Mode
1.0mA
88eV
10.0eV
-130V
Emission Current in RGA Mode
On older instruments (those with serial numbers LM75-00298025 and below) the
emission current should be set to 0.70mA.
On newer instruments (those with serial numbers LM75-00298026 and greater) the
emission current should be set to 0.39mA.
This change results from changes to parts used in the ion source. An incorrect
emission current setting will result in a loss of sensitivity.