MKS HPQ2-IP Скачать руководство пользователя страница 37 | Manualshive

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MKS HPQ2-IP Скачать руководство пользователя страница 37

HPQ2-IP SP101009.102 – 10 October 2012

MKS Instruments, Spectra Products

37

HPQ2-IP Analyser
Reference

Part Description

1

Flange Sub Assembly

2

Filament Sub Assembly

3

Repeller Plate Sub Assembly

4

Source Plate Sub Assembly

5

Extraction Plate Sub Assembly

11

HPQ2-IP Source Mounting Ring

12

HPQ2-IP Filter Clamp Ring

13

HPQ2-IP F/Electrode

14

Ceramic Filter Saddle

15

HPQ2-IP Filter Mount

16

HPQ2-IP Faraday Cup

17

HPQ2-IP Filament Barrel Connector

18

HPQ2-IP Connector

19

RF Loop for HPQ2-IP

20

Screw M1.6 x 5.6 modified

28

Screw M1.6 x 3 ch hd stainless steel

29

Screw M1.6 x 8 ch hd stainless steel

30

Screw M1.6 x 16 ch hd stainless steel

31

Screw M2 x 3 socket hd stainless steel

32

Screw M2.5 x 6 ch hd stainless steel

38

Washer Plain M1.6 stainless steel

43

Washer Ceramic 5.5 x 2.9 x 0.5mm

44

Ceramic Spacer 1mm White XDA080

45

Ceramic Tube 2.7 x 1.7 x 4.0mm long

46

Tube 0.076”dia x 0.056” id x .375” long Aly53

47

Alsint Tube 2mm x 1.2mm x 300mm long

48

Nickel Wire 1mm dia.

49

Stainless Steel Wire 22swg.

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Содержание HPQ2-IP

Страница 1: ...HPQ2 IP Manual SP101009 103 10 October 2012...

Страница 2: ...can send your comments to MKS Instruments Spectra Products Cowley Way Weston Road Crewe Cheshire CW1 6AG United Kingdom Tel 44 0 1270 250150 Email Maual_info mksinst com MKS Products provided subject...

Страница 3: ...COMPATIBILITY DIRECTIVE 2006 95 EC LOW VOLTAGE DIRECTIVE THE APPLICABLE STANDARDS ARE EN 61326 1998 ELECTRICAL EQUIPMENT FOR MEASUREMENT CONTROL LABORATORY USE EN 61010 1 1993 SAFETY REQUIREMENTS FOR...

Страница 4: ...h has no accessible hazardous live parts The external circuits must comply with the requirements of EN61010 1 section 6 6 1 Ports for connection of accessories do not carry hazardous potentials Do not...

Страница 5: ...pectra accessories via MKS Spectra supplied cables There are no accessible hazardous voltages or currents on these ports MKS Spectra must be consulted before any non MKS Spectra supplied cables or acc...

Страница 6: ...required to obtain a greater separation between control unit and RF head or if longer serial communications cables are required they must be supplied by MKS Instruments Ltd 5 Cables attached to all ot...

Страница 7: ...eturned to MKS Instruments Spectra Products Ltd unless special arrangements are made 3 There are no user serviceable parts in the electronic equipment Certain components are EMC and safety critical an...

Страница 8: ...Checking the System Pressure 20 4 5 Mounting the Analyser 20 5 Control Unit Installation 22 5 1 Connecting the Control Unit to the Analyser 22 5 2 Electrical Connections 23 5 3 IP Address 23 5 4 Re s...

Страница 9: ...HPQ2 IP SP101009 102 10 October 2012 MKS Instruments Spectra Products 9 9 Ion Source Parameters 38 10 Communications Troubleshooting 39 11 Returning Your Unit for Service 46...

Страница 10: ...Detectable Partial Pressure 1 x 10 10 mBar 8 x 10 11 Torr Mass Stability Better than 0 1 amu over 8 hours at constant ambient temperature Resolution 1 2 amu at 10 peak height Total shipping weight 6...

Страница 11: ...rol unit Control Unit Weight 2 3kg Dimensions 127mm x 127mm x 210mm Overall length 2245mm Maximum Ambient Operating Pressure 350 C non condensing PC Software Process Eye Professional or Easyview Power...

Страница 12: ...wer supply into one extremely compact unit which fits directly onto the quadrupole analyser A separate low voltage power supply connects to the HPQ2 IP control unit The HPQ2 IP is designed to be opera...

Страница 13: ...ternatively power may be derived from a suitable Spectra Remote Vacuum Controller if the complete system incorporates one The HPQ2 IP control unit plugs directly onto the HPQ2 IP quadrupole analyser v...

Страница 14: ...Type socket labelled POWER on the rear panel of the unit to connect to the low voltage power supply unit Pin connections are 1 2 3 joined together 24 volts DC 9 10 11 joined together 0 volts 24 volt r...

Страница 15: ...s supplied to the HPQ2 unit Comms This indicator will flash to show a comms event to the HPQ2 IP unit If there are no active communications with the HPQ2 IP this indicator will pulse at approximately...

Страница 16: ...Type socket mounted on the rear panel of the HPQ2 IP unit and labelled ANALOG I O It consists of one analog output 0 to 10V and four quasi differential analog inputs 0 to 10V with a maximum voltage on...

Страница 17: ...e input module and Valve Controller The Digital I O port provides Two 8 bit bi directional ports one interrupt strobe input 5V fused at 100mA 15V fused at 100mA DIGITAL I O Connector Pin Assignment Pi...

Страница 18: ...uge or a signal from a vacuum control system to be connected to the HPQ2 IP It is the most effective of the trips available and we would always recommend its use The external trip input can be driven...

Страница 19: ...ems listed on the packing slip as shipped which are not in the box immediately contact your local MKS Spectra sales service representative 4 2 Inspecting the Analyser CAUTION The analyser is both frag...

Страница 20: ...pressure exceeds the above you must make sure you switch off the filaments We would recommend using a cold cathode gauge or capacitance manometer with a set point and relay contacts connected to the e...

Страница 21: ...using tube is as close to 9 o clock as the bolt holes will allow This will ensure that the HPQ2 IP control unit is in its preferred position although it can be mounted in any orientation The HPQ2 IP w...

Страница 22: ...RF analyser connector so that the slot which will be directly below the threads of the M5 socket set screw lines up with the keyway on the connector tube Hold the HPQ2 IP control unit so that the key...

Страница 23: ...ch lead may be used If required connect your X Trip signal cable to the socket marked X TRIP Care should be taken in routing and securing all cables Avoid running any of the signal cables next to main...

Страница 24: ...aking The HPQ2 IP control unit should not be exposed to temperatures above 40o C so it should be removed from the analyser during baking The analyser may be baked up to 250o C but care should be taken...

Страница 25: ...ource or ioniser This is located at the top furthest from the flange of your analyser and its function is to take a representative sample of molecules and atoms from your vacuum chamber convert them i...

Страница 26: ...someone forgets to turn on the water cooling for the oil diffusion pump etc These occurrences only vary in the magnitude of the disaster that ensues Routinely there is only one area of the analyser th...

Страница 27: ...led Filaments The filament status is constantly monitored by the power supply electronics and the operating software This is done by measuring the flow of electrons emitted by the hot filament referre...

Страница 28: ...ge you should have a short circuit If not you have a serious problem or more likely a faulty meter 3 Connect the second meter lead to each of pins 2 to 12 on the analyser feedthrough in turn Each one...

Страница 29: ...nd meter lead to pin 10 Filament 2 again your meter should indicate a short circuit If either or both filaments are blown the meter will indicate an open circuit and the filaments should be replaced I...

Страница 30: ...g on the analyser 7 8 Removing the Filaments 1 Remove the analyser from the vacuum chamber making sure you do not touch any of the exposed surfaces Place the analyser on the bench so that the ion sour...

Страница 31: ...uld be exercised at all stages to ensure that no shorts are introduced and that the analyser is kept clean 1 Place the filament assembly in the correct orientation onto the top of the source ensuring...

Страница 32: ...ean bench on which to work An Ohmmeter A clean container in which to put small parts Replacement filament s Replacement source parts if necessary A pen and paper on which to make notes and sketches So...

Страница 33: ...Page 33 2 Place the ion source in the beaker and fill with sufficient isopropyl alcohol ipa to fully immerse the ion source Place in the ultra sonic bath for 10 to 15 minutes 3 Replace the ipa and pla...

Страница 34: ...bove the analyser and then fit the three wires into the three barrel connectors on the various plates which make up the ion source This is quite difficult and requires patience so take your time 2 Whe...

Страница 35: ...35 8 Exploded Views 8 1 Analyser Flange pin outs Pin Descriptions Pin Connection 1 Earth 2 Source plate 3 Electron Multiplier 4 Filament 1 5 Extraction plate 6 Suppressor plate 7 RF 1 8 Repeller plat...

Страница 36: ...HPQ2 IP SP101009 102 10 October 2012 MKS Instruments Spectra Products 36 8 2 Exploded View of the Analyser...

Страница 37: ...Cup 17 HPQ2 IP Filament Barrel Connector 18 HPQ2 IP Connector 19 RF Loop for HPQ2 IP 20 Screw M1 6 x 5 6 modified 28 Screw M1 6 x 3 ch hd stainless steel 29 Screw M1 6 x 8 ch hd stainless steel 30 Sc...

Страница 38: ...0 39mA 70eV 7 0eV 110V HPQ2 IP HP Mode 0 1mA 35eV 5 0eV 58V HPQ2 IP Leak Mode 1 0mA 88eV 10 0eV 130V Emission Current in RGA Mode On older instruments those with serial numbers LM75 00298025 and belo...

Страница 39: ...LED illuminated Is unit visible in Device Manager Check network link status Has the host an IP address Check patch cable and x over adaptor Replace patch cable and x over adaptor Verify network connec...

Страница 40: ...The following paragraph explains the procedure Open Windows Control Panel and select the NETWORK CONNECTIONS icon Choose the network connection you are using for the link with the instrument right cl...

Страница 41: ...ork connection you are using for the link with the instrument right click and choose PROPERTIES Highlight the INTERNET PROTOCOL TCP IP entry from the list and click on the PROPERTIES button The follow...

Страница 42: ...e link with the instrument right click and choose PROPERTIES Highlight the INTERNET PROTOCOL TCP IP entry from the list and click on the PROPERTIES button The default IP address of the instrument is 1...

Страница 43: ...ent differs from the IP address of the host computer In this example the host PC will not be able to communicate with the instrument while the two IP addresses are in different ranges There are two op...

Страница 44: ...address of the instrument and the IP address of the host computer are in the same IP range In the above case communication between the host PC and the instrument is possible though Device Manager wil...

Страница 45: ...nstrument to its default IP address of 192 168 0 250 carry out the following procedure Power on the unit Press the RESET button and immediately press and hold the PRESET button for 20 seconds Importan...

Страница 46: ...s date of purchase and a detailed fault description Fill in the relevant sections of the Health and Safety Returns Form on pages 51 and 52 of this manual or we can provide you with a copy This form MU...

Страница 47: ...on before we receive the equipment A copy should also be given to the carrier FAILURE TO COMPLETE THIS FORM OR COMPLY WITH THE PROCEDURE WILL LEAD TO DELAYS IN SERVICING THE EQUIPMENT Please Complete...

Страница 48: ...se substances Action to be taken in the event of human contact or spillage I hereby confirm that the only toxic or hazardous substances that the equipment specified above has been in contact with are...

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