MKS 1579A, Инструкция по эксплуатации

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1579A/579A Chapter 1: General Information
15
Instruction Manual
Contents
This manual provides instructions on setup, installation, operation and service of:
•
Mass flow controller 1579A/B / analog version
•
Mass flow controller 1579A/B / profibus version
•
Mass flow meter 579A/B / analog version
•
Mass flow meter 579A/B / profibus version
Conventions
If not explicitly expressed differently at the respective place in this handbook all data are
referenced to:
a) Temperature in °C
b) Gas type is nitrogen N2
c) Pressure
in mbar or bar with index (a) relating to absolute pressure whereas index (g) stands for
gage pressure, related to atmosphere.
Example: 1,7 bar (g) = 1,7 bar overpressure versus atmosphere (gage pressure).
0,5 bar (a) = 500 mbar absolute pressure.
d) Flow rates
are given in sccm** or slm*** related to nitrogen or dry air.
Designations and Names
The mass flow meter 579A/B will only be mentioned in particular where this is necessary, else wise
the instructions for the 1579A/B also apply for the meter 579A/B.
In some places the appendix for version A is not printed, e.g. 1579 instead of 1579A/B without any
restriction for functionality etc.
** 1 sccm = 1 standard cm
3
/ min ; standard conditions: 1013,25 mbar and 0 °C
*** 1 slm = 1 standard liter / min = 1000 sccm