MKS 1579A, Инструкция по эксплуатации

Страница: 75 / 87

1579A/579A Appendix B: Model Codes
75
Appendix B: Model Codes
Model Code
The desired instrument and options are identified in the model code when you order the unit. All
parts of the product code apply to both the mass flow controller and the mass flow meter. These
instruments are provided with digital boards and either digital or analog interfaces, depending on
the connector code.
The model code is identified as follows:
XXXXAYYYZZZF1CEAA
Type Number
Calibrated for
SEMI Gas Number
Calibrated Gas
Fittings
Valve Type
where:
Full Scale Range of
(max. 300 slm N2 equivalent)
Seals
Software Version
Electrical/Communications
Connector
Type Number (XXXXA)
This Designates the Model Number of the instrument.
The Elastomer Sealed Mass Flow Controller is identified as Type 1579A.
The Mass Flow Meter is identified as Type 579A.
The 1579 B is the RoHS compliant version of the 1579 A .
The 579 B is the RoHS compliant version of the 579 A .