MKS 109030111, Инструкция по эксплуатации

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4 Installation
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Series 903 Cold Cathode Vacuum Sensor
Instruction Manual - #109030026
Chapter 4
4 Installation
4.1 Transducer Location
Locate the 903 Transducer where it can measure process chamber or manifold pressure. Install it
away from pumps, other vibration sources, and gas sources to give the most representative values.
Locate and orient the Sensor where contamination is least likely. If it is installed directly above a
diffusion pump, for example, oil vapor could contaminate the cathode, anode, or other vacuum
exposed components, causing the calibration to shift.
The Transducer can be installed with the body set in any direction. Operating position does not
affect accuracy. Installing it with the vacuum port facing down is optimal as this helps prevent
contaminants falling into it.
4.2 Connect the Transducer to the Vacuum System
Mount the Transducer to a grounded vacuum system.
Notice
Install the Transducer on the vacuum chamber where it is protected from
physical damage and high heat.
See Section 2.5, Over Pressure Conditions, for important safety information
before mounting the gauge.
Proper Grounding
Improper grounding could cause product failure or personal
injury.
• Follow ground network requirements for the facility.
• Maintain all exposed conductors at Earth ground.
• Make sure the vacuum port to which the gauge is mounted is
properly grounded.