MKS 109030111, Инструкция по эксплуатации

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5 Operation
23
Series 903 Cold Cathode Vacuum Sensor
Instruction Manual - #109030026
Chapter 5
1 Operation
5.1 Introduction
The Series 902 Inverted Magnetron Cold Cathode Sensor is designed for applications which require
pressure measurement in the range from 5 x 10
-3
down to 3 x 10
-10
Torr. Its rapid response and
wide measurement range provide the equipment designer with maximum flexibility. The sensor
operates autonomously as part of a control system and is adaptable to several roles, including
system monitoring and actuating an alarm.
The sensor is normally OFF and requires shorting its High Voltage Enable pin to ground to turn it
ON, which allows it to be controlled by a higher pressure sensor such as the Series 907 Analog
Convection Transducer.
The 903 Sensor can be located out of sight; pressure is then read from a standard digital voltmeter
or analog-to-digital converter and computer.
Typical Applications for the Series 903 Cold Cathode Sensor
• Measurement of high vacuum chamber pressures
• Controlling system pressure using the analog output as input to an automatic pressure controller
• Measuring pressures of backfilled gases
• Leak testing your vacuum system
Figure 5-1: Typical Ion Gauge Schematic