MKS 109030111, Инструкция по эксплуатации

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6 Service & Maintenance
35
Series 903 Cold Cathode Vacuum Sensor
Instruction Manual - #109030026
6.7 Bakeout the Sensor
Turn OFF power to the 903 Sensor and remove its cable. Remove the two Phillips head screws
holding the electronics assembly to the sensor body. The remainder of the Sensor is ready to be
baked out to 400 °C if using a CF flange or to 150 °C if using a KF flange.
6.8 Leak Detection
The inherent sensitivity to gas type makes the Series 903 Sensor useful for detecting leaks in vacuum
systems. It is a good complement to a mass spectrometer leak detector, which locates smaller leaks.
Probe the suspected leak areas with a gas that has an ionization potential different than that of the
system gas. Helium or argon gas is suitable for probing a system pumping air or nitrogen.
1. Pump the vacuum system to a base pressure.
2. Slowly and methodically probe with a small amount of gas. Flooding the leak or moving
quickly past the leak can confuse the search since time lags may be significant.
3. Note the pressure reading. The pressure will either rise or fall, depending upon the ionization
potential of the probe gas relative to the system gas. The largest change in value indicates the
probe gas is nearest the leak location.
4. Repeat the test to confirm.
6.9 Customer Service / Technical Support
Some minor problems are readily corrected on site. If the product requires service, contact the MKS
Technical Support Department at +1-833-986-1686. If the product must be returned to the factory
for service, request a Return Material Authorization (RMA) from MKS. Do not return products
without first obtaining an RMA. In some cases a hazardous materials disclosure form may be
required. The MKS Customer Service Representative will advise you if the hazardous materials
document is required.
When returning products to MKS, be sure to package the products to prevent shipping damage.
Shipping damage on returned products as a result of inadequate packaging is the Buyer's
responsibility.
For Customer Service / Technical Support:
MKS Global Headquarters
2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: +1-833-986-1686
Email: insidesales@mksinst.com
Visit our website at: www.mksinst.com