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Instruction manual part number 109030026
Revision B - May 2020

Series 903

Instruction Manual

Inverted Magnetron Cold Cathode
Ionization Vacuum Sensor

Customer Service / Technical Support:

MKS Global Headquarters

2 Tech Drive, Suite 201
Andover MA, 01810 USA
Phone: +1-833-986-1686
Email: [email protected]
Visit our website at www.mksinst.com

Содержание 109030111

Страница 1: ...Inverted Magnetron Cold Cathode Ionization Vacuum Sensor Instruction manual part number 109030026 Revision B May 2020 Series 903 Instruction Manual...

Страница 2: ......

Страница 3: ...903 This instruction manual is for use with Series 903 Inverted Magnetron Cold Cathode Ionization Vacuum Sensor A list of applicable catalog numbers is provided on the following page Inverted Magnetro...

Страница 4: ...Series 903 Inverted Magnetron Cold Cathode Ionization Vacuum Sensor Catalog numbers for Series 903 Cold Cathode Ionization Vacuum Sensor 109030111 109030112 109030113 109030114...

Страница 5: ...Transducer to the Vacuum System 19 4 3 Electrical Connections 21 4 3 1 Input Output Wiring 21 Chapter 5 Operation 23 5 1 Introduction 23 5 2 Theory of a Cold Cathode Ionization Sensor 24 5 3 Starting...

Страница 6: ...6 Series 903 Cold Cathode Vacuum Sensor Instruction Manual 10903002...

Страница 7: ...rder or airline making delivery to the customs broker must be notified within 15 days of delivery The following illustrates to whom the claim is to be directed If an airfreight forwarder handles the s...

Страница 8: ...turn products without first obtaining an RMA In some cases a hazardous materials disclosure form may be required The MKS Customer Service Representative will advise you if the hazardous materials docu...

Страница 9: ...es a hazardous situation which if not avoided will result in death or serious injury Warning indicates a hazardous situation which if not avoided could result in death or serious injury Caution indica...

Страница 10: ...local regulations Operation and Service of this equipment in strict accordance with the methods and procedures supplied by MKS is the responsibility of the Customer MKS assumes no liability whatsoeve...

Страница 11: ...on via a plasma to couple a high voltage electrode potential to the vacuum chamber If exposed conductive parts of the gauge controller and chamber are not properly grounded they may attain a potential...

Страница 12: ...ltage All conductors in on or around the vacuum system that are exposed to potential high voltage electrical discharges must either be shielded at all times to protect personnel or must be connected t...

Страница 13: ...irm that these safety devices are properly installed before installing and operating the product Ensure the following precautions are complied with at all times 1 the proper gas cylinders are installe...

Страница 14: ...has been dropped or the enclosure has been damaged f When the product exhibits a distinct change in performance This indicates a need for service See Service Guidelines Section 1 5 for detailed inform...

Страница 15: ...ruments are to be used only in accordance with the instructions in this operation manual 3 2 1 Improper Use Removal of any factory installed components Modifying any factory installed components Remov...

Страница 16: ...mum Internal Operating Voltage 4 kV maximum current limited to 133 A Output Voltage 0 5 to 7 7 VDC linear output 30 maximum output impedance Output Load 100 k nominal 10 k minimum Physical Display LED...

Страница 17: ...3 Specifications 17 Series 903 Cold Cathode Vacuum Sensor Instruction Manual 109030026 3 5 1 Dimensions Figure 3 1 Series 903 Cold Cathode Sensor Dimensions...

Страница 18: ...3 Specifications 18 Series 903 Cold Cathode Vacuum Sensor Instruction Manual 109030026 Notes...

Страница 19: ...ucer can be installed with the body set in any direction Operating position does not affect accuracy Installing it with the vacuum port facing down is optimal as this helps prevent contaminants fallin...

Страница 20: ...tools to tighten the metal clamp For an NW16CF 1 33 inch or NW35CF 2 75 inch flange Attach the Transducer to the mating flange on the vacuum chamber Use a new copper seal between the flanges do not u...

Страница 21: ...tion and to reduce stress on the connectors Table 4 1identifies the pins the pinout of the 9 pin D sub connector The power supply input may range from 14 to 30 Vdc The positive side of the power suppl...

Страница 22: ...at higher pressures An output of greater than 9 5 V indicates the high voltage is OFF and an output of less than 0 5 V indicates no power to the transducer or that discharge has not yet started Do no...

Страница 23: ...onitoring and actuating an alarm The sensor is normally OFF and requires shorting its High Voltage Enable pin to ground to turn it ON which allows it to be controlled by a higher pressure sensor such...

Страница 24: ...ure P obeys the relationship i kP n where k is a constant P is in Torr n is a constant usually in the range of 1 00 to 1 15 This equation is valid for the pressure range from 10 3 Torr down to 10 8 To...

Страница 25: ...he UHV pressure range starting may be delayed by several minutes The SensaVac IgniTorr Cold Cathode Starting Device may be used to reduce starting time see Section 6 6 Accessories and Spare Parts 5 3...

Страница 26: ...onnect a digital voltmeter to the Common tip jack and the Vacuum Indicator tip jack on the 903 Sensor See Figure 5 3 Adjust the potentiometer with a small screwdriver until the voltage reading coincid...

Страница 27: ...3 Sensor with Other Gases In a cold cathode ionization sensor the degree of ionization hence the indicated pressure is gas type dependent See Section 5 2 The Series 903 Sensor is calibrated to give a...

Страница 28: ...ationship for a gas which is not shown on the graph in Figure 5 2 the sensor must be calibrated This requires a gas independent sensor such as a capacitance manometer or spinning rotor gauge to act as...

Страница 29: ...tic sensitive devices or other components removed from the product Do not handle static sensitive devices more than absolutely necessary and only when wearing a ground strap Do not use an ohmmeter for...

Страница 30: ...or the enclosure has been damaged The product exhibits a distinct change in performance This may indicate a need for service Product Modifications Do not substitute parts or modify the instrument Bec...

Страница 31: ...s are too erratic 1 Contaminated sensor 1 Inspect and clean if necessary See Section 6 No analog output voltage 1 D sub is disconnected 2 Power supply turned OFF 3 Defective PC board 1 Connect D sub 2...

Страница 32: ...smooth jaw needle nose pliers firmly grasp the compression spring at the tip closest to the flange 3 Pull on the compression spring while rotating it to free it from the formed groove of the sensor b...

Страница 33: ...round shield interlocks with the locating collar 12 2 Slide the small ceramic spacer 5 over the small end of the ground shield 6 Check that the leaf spring 10 will contact the base of the cathode as s...

Страница 34: ...Inside the Sensor 6 6 Accessories and Spare Parts Table 6 2 Accessories and Spare Parts Part Item Part IgniTorr Cold Cathode Starting Device 120V 100006850 220V 100007090 Internal Rebuild Kit Cathode...

Страница 35: ...ignificant 3 Note the pressure reading The pressure will either rise or fall depending upon the ionization potential of the probe gas relative to the system gas The largest change in value indicates t...

Страница 36: ...6 Service Maintenance 36 Series 903 Cold Cathode Vacuum Sensor Instruction Manual 109030026 Notes...

Страница 37: ...ption 15 Improper Use 15 Intended Use 15 O Over Pressure Conditions 13 R Receiving Inspection 7 S Safety Cautions Warnings 9 10 Service 14 Contact Information 35 Guidelines 8 35 Service guidelines 29...

Страница 38: ...Series 903 Cold Cathode Vacuum Sensor Instruction Manual 109030026...

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Страница 40: ...03 Instruction Manual Inverted Magnetron Cold Cathode Ionization Vacuum Sensor Customer Service Technical Support MKS Global Headquarters 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 833 986 16...

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