MKS 109030111, Инструкция по эксплуатации

Страница: 20 / 40

4 Installation
20
Series 903 Cold Cathode Vacuum Sensor
Instruction Manual - #109030026
Connect the Transducer to the vacuum system flange using the appropriate gasket and mounting
hardware.
Orient the Transducer to prevent condensation of process vapors on the internal surfaces through
line-of-sight access to its interior. If vapor condensation is likely, orient the port downward to help
liquids drain out.
For an NW16KF, NW25KF or NW40KF flange:
The NW##KF style flange requires a self-centering O-ring between mating flanges. Use a metal
clamp and tighten the clamp to compress the mating flanges together. Do Not use a plastic clamp.
See the Grounding Requirements.
Attach the Transducer to the mating NW-style connector on the vacuum chamber. Use a new seal
and the appropriate tools to tighten the metal clamp.
For an NW16CF (1.33 inch) or NW35CF (2.75 inch) flange:
Attach the Transducer to the mating flange on the vacuum chamber. Use a new copper seal
between the flanges - do not use a previously used seal. If the flanges have leak test grooves, be sure
they are properly aligned.
Finger tighten all 6 bolts. Use the appropriate tools to tighten the 6 bolts. Tighten the bolts in a
circular pattern (such as 1, 3, 5, 2, 6, 4, 1, 3, 5, 2, 6, 4) until the flanges are in contact. After contact,
torque each bolt to 12 lb ft.
For an O-ring Compression Seal fitting:
The Transducer can also use a ½" O-ring compression seal acting on the tubing above the thread,
but the O-ring seal cannot be used for positive pressure applications.
Notice
A solid electrical connection between the sensor tube and the grounded
vacuum system must be used to shield the electronics from external power
sources.
Do not use a compression mount/quick connect fitting for
positive pressure applications.