MKS 109030111, Инструкция по эксплуатации

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2 Safety
11
Series 903 Cold Cathode Vacuum Sensor
Instruction Manual - #109030026
2.3 Grounding Requirements
See Grounding, Section 4.2 in the Installation chapter for more detailed requirements regarding
gauge and system grounding.
Grounding is very important! Be certain that ground circuits are correctly used on your ion gauge
power supplies, gauges, and vacuum chambers, regardless of their manufacturer. Safe operation of
vacuum equipment requires grounding of all exposed conductors of the gauges, the controller and
the vacuum system. LETHAL VOLTAGES may be established under some operating conditions
unless correct grounding is provided.
Ion producing equipment, such as ionization gauges, mass spectrometers, sputtering systems, etc.,
from many manufacturers may, under some conditions, provide sufficient electrical conduction via
a plasma to couple a high voltage electrode potential to the vacuum chamber. If exposed
conductive parts of the gauge, controller, and chamber are not properly grounded, they may attain a
potential near that of the high voltage electrode during this coupling. Potential fatal electrical shock
could then occur because of the high voltage between these exposed conductors and ground.
Proper Grounding
All components of a vacuum system used with this or any
similar high voltage product must be maintained at Earth
ground for safe operation.
Be aware that grounding this product does not guarantee that
other components of the vacuum system are maintained at
Earth ground.
Verify that the vacuum port to which the Series 903 Transducer
is mounted is electrically grounded. It is essential for personnel
safety as well as proper operation that the envelope of the
gauge be connected to a facility ground. See Section 4.2 for
detailed grounding instructions.
Connect power cords only to properly grounded outlets or
sources.