MKS 109030111, Инструкция по эксплуатации

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2 Safety
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Series 903 Cold Cathode Vacuum Sensor
Instruction Manual - #109030026
2.5 Over Pressure Conditions
Danger of injury to personnel and damage to equipment exists on all vacuum systems that
incorporate gas sources or involve processes capable of pressuring the system above the limits it
can safely withstand.
For example, danger of explosion in a vacuum system exists during backfilling from pressurized gas
cylinders because many vacuum devices such as ionization gauge tubes, glass windows, glass
belljars, etc., are not designed to be pressurized.
Install suitable devices that will limit the pressure from external gas sources to the level that the
vacuum system can safely withstand. In addition, install suitable pressure relief valves or rupture
disks that will release pressure at a level considerably below that pressure which the system can
safely withstand.
Suppliers of pressure relief valves and pressure relief disks can be located via an online search.
Confirm that these safety devices are properly installed before installing and operating the
product.
Ensure the following precautions are complied with at all times:
(1) the proper gas cylinders are installed,
(2) the gas cylinder valve positions are correct on manual systems,
(3) and the automation is correct on automated gas delivery systems.
Explosive Environment
Do not use the Series 3903 Transducer in an environment of
explosive or combustible gases or gas mixtures. Operation of
any electrical instrument in such an environment constitutes a
definite safety hazard. Do not use the product to measure the
pressure of explosive gases or gas mixtures.
Potential Automatic Operation
It is the installer's responsibility to ensure that the automatic
signals provided by the product are always used in a safe
manner. Carefully check the system programming before
switching to automatic operation.
Vacuum Chamber High Pressures
Where an equipment malfunction could cause a hazardous
situation, always provide for fail-safe operation. As an
example, in an automatic backfill operation where a
malfunction might cause high internal pressures, provide an
appropriate pressure relief device.