(2) Centering the reticle
1
䋮
Place a small workpiece on the stage glass. Turn the Micrometer Heads to align an edge of the
workpiece with the center of the cross-hair.
2
䋮
Rotate the angle scale disc 180
q
and read the displacement between the edge of the workpiece
and the center of the cross-hair.
3
䋮
Remove the four screws from the angle dial cover and dismount it. Slightly loosen the four fixing
screws.
4
䋮
Adjust the eyepiece mount position with the four adjustment screws to minimize the
displacement between the edge of the workpiece and the center of the cross-hair. Centering is
easily performed by moving the eyepiece mount by half the displacement in both the X and Y
directions.
Two pairs of adjustment screws are located at the opposite sides (for adjusting the X and Y
displacements). Adjust the screws in pairs. Loosen one on one side, and then tighten its counterpart
on the other side to adjust the displacement.
5
䋮
Turn the Micrometer Heads to align an edge of the workpiece with the center of the cross-hair.
Rotate the angle dial 180
q
and check the displacement.
6
䋮
Repeat steps 1, 2, 4, 5 until the displacement is within 3
μ
m.
7
䋮
Confirm that the four adjustment screws are fully tightened.
8
䋮
Tighten the four fixing screws and replace the angle dial cover.
1
㧚
2
㧚
4
㧚
Small workpiece
2. Installation and setup
15
Содержание TM-500 Series
Страница 2: ......
Страница 8: ...CONTENTS vi ...
Страница 18: ...2 Installation and setup 16 ...
Страница 32: ...4 Maintenance 30 ...
Страница 36: ...5 Troubleshooting 34 ...
Страница 41: ... Reference Diagrams 㪏 Top view of XY stage TM 505 505R Detail drawing of T groove 8 Reference Diagrams 39 ...
Страница 42: ...8 Reference Diagrams 40 TM 510 510R Detail drawing of T groove ...