CONTENTS
v
3.2
Measurement
......................................................................................................... 22
3.2.1
Dimensional measurement
......................................................................... 22
3.2.2
Angle measurement
.................................................................................... 23
3.2.3
Template matching inspection
................................................................... 24
3.2.4
Step measurement
...................................................................................... 24
4.
Maintenance
................................................................................................................... 25
4.1
Cleaning and Lubrication
...................................................................................... 25
4.2
Inspection
.............................................................................................................. 25
4.3
Replacing Consumable Parts
................................................................................ 27
4.4
Consumable Parts
.................................................................................................. 29
5.
Troubleshooting
.............................................................................................................. 31
6.
Specifications
................................................................................................................. 35
7.
Optional Accessories
...................................................................................................... 37
8.
Reference Diagrams
...................................................................................................... 39
SERVICE NETWORK
....................................................................................................... 41
Содержание TM-500 Series
Страница 2: ......
Страница 8: ...CONTENTS vi ...
Страница 18: ...2 Installation and setup 16 ...
Страница 32: ...4 Maintenance 30 ...
Страница 36: ...5 Troubleshooting 34 ...
Страница 41: ... Reference Diagrams 㪏 Top view of XY stage TM 505 505R Detail drawing of T groove 8 Reference Diagrams 39 ...
Страница 42: ...8 Reference Diagrams 40 TM 510 510R Detail drawing of T groove ...