5. Troubleshooting
33
(4)The light intensity of surface illumination cannot be adjusted
(if the surface illumination switch is turn on ).
Check
䋺
Is the surface illumination bulb lit?
YES No
Refer to "(2) The surface illumination bulb will not light".
Contact Mitutoyo.
(5)The optical tube will not move up and down properly.
If there is any abnormal tightness, play, unevenness, or sound when the optical tube is moved, contact
Mitutoyo. Should this be the case, do not continue to move the optical tube or disassemble it.
(6)The angle dial will not rotate properly.
If there is any abnormal tightness, play, unevenness, or sound when the optical tube is moved, contact
Mitutoyo. Should this be the case, do not continue to move the optical tube or disassemble it.
(7)The XY stage will not properly be fed.
If there is any abnormal tightness, play, unevenness, or sound when the XY stage is fed, contact Mitutoyo.
Should this be the case, do not continue to feed the XY stage or disassemble it. If the feeding accuracy has
deteriorated, determine whether the stage or the Micrometer Head is the problem and contact Mitutoyo.
(8)There is a shadow in the field of view.
Check for:
z
Obstruction between the contour illumination bulb and the objective .
z
Contaminated reticle.
z
Contaminated objective or eyepiece.
If the problem cannot be rectified, contact Mitutoyo.
(9)The resolution in a region of the field of view is poor.
Check for:
z
Poor focusing (because of a stepped workpiece).
z
Oil soiling the workpiece.
z
Improperly mounted objective or eyepiece.
z
Contaminated or damaged (such as scratch) objective or eyepiece.
z
Contaminated or damaged (such as scratch) reticle.
If the problem cannot be rectified, contact Mitutoyo.
Содержание TM-500 Series
Страница 2: ......
Страница 8: ...CONTENTS vi ...
Страница 18: ...2 Installation and setup 16 ...
Страница 32: ...4 Maintenance 30 ...
Страница 36: ...5 Troubleshooting 34 ...
Страница 41: ... Reference Diagrams 㪏 Top view of XY stage TM 505 505R Detail drawing of T groove 8 Reference Diagrams 39 ...
Страница 42: ...8 Reference Diagrams 40 TM 510 510R Detail drawing of T groove ...