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CONTENTS

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PREFACE

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CONVENTIONS USED IN THIS MANUAL

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PRECAUTIONS

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WARRANTY

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Outline

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1.1

Description

.............................................................................................................. 7

Name of Each Part

................................................................................................. 8

Installation and Setup

..................................................................................................... 11

2.1

Package Contents

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2.2

Installation Site

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2.3

Setting-up

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2.4

Checking and Adjustment

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2.4.1

Checking the reticle position against the XY stage movement direction

.. 13

2.4.2

Checking the centering of the reticle

......................................................... 13

2.4.3

Adjusting the reticle

................................................................................... 14

Measurement

.................................................................................................................. 17

3.1

Preparations for Measurement

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3.1.1

Precautions for measurement

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3.1.2

Replacing the lenses

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3.1.3

Fixing the workpiece

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3.1.4

Illumination modes

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3.1.5

Replacing reticles

....................................................................................... 20

3.1.6

Adjusting the diopter

.................................................................................. 20

3.1.7

Bringing the measuring surface into focus

................................................. 21

3.1.8

Positioning the workpiece

.......................................................................... 21

CONTENTS

Содержание TM-500 Series

Страница 1: ...AL No 4769AԘ SERIES No 176 TM 500 Series TOOLMAKER S MICROSCOPE User s Manual㩷 Read this User s Manual thoroughly before operating the instrument After reading retain it close at hand for future reference 㩷 ...

Страница 2: ......

Страница 3: ...is user s manual retain it for future reference CONVENTIONS USED IN THIS MANUAL The following visual cues are used throughout this manual to identify different types of information DANGER Indicates that the operator should exercise care to avoid danger of fire explosion or personal injury 㩷 CAUTION㩷 Indicates that operating the instrument in this manner may damage it or may cause it to malfunction...

Страница 4: ... to direct sunlight 3 Explosive Hazard 䃂Do not operate the Measuring Microscope in the presence of explosive gas 4 Power Supply 䃂Depending on the installation site voltage fluctuation may cause a change in light intensity or flickering of the illumination bulb Although this does not affect measurement use a voltage stabilizer if a stable light intensity is required 䃂Use an AC power supply which is...

Страница 5: ...wire from the Measuring Microscope to the body of a piece of equipment which also must be grounded The grounding wire should be as short as possible and should not be wound into a loop or coil 6 Do Not Disassemble 㩷䃂There are high voltages inside the Measuring Microscope Do not attempt to disassemble it unless otherwise specified WARRANTY In the event that the Mitutoyo Measuring Microscope TM 500...

Страница 6: ...the reticle position against the XY stage movement direction 13 2 4 2 Checking the centering of the reticle 13 2 4 3 Adjusting the reticle 14 3 Measurement 17 3 1 Preparations for Measurement 17 3 1 1 Precautions for measurement 17 3 1 2 Replacing the lenses 18 3 1 3 Fixing the workpiece 18 3 1 4 Illumination modes 19 3 1 5 Replacing reticles 20 3 1 6 Adjusting the diopter 20 3 1 7 Bringing the me...

Страница 7: ... 3 Template matching inspection 24 3 2 4 Step measurement 24 4 Maintenance 25 4 1 Cleaning and Lubrication 25 4 2 Inspection 25 4 3 Replacing Consumable Parts 27 4 4 Consumable Parts 29 5 Troubleshooting 31 6 Specifications 35 7 Optional Accessories 37 8 Reference Diagrams 39 SERVICE NETWORK 41 ...

Страница 8: ...CONTENTS vi ...

Страница 9: ...the TM 500 series supports a wide range of applications from shop floor inspection measurement of tools and machined parts to precision measurement of test tools in a measuring room z A long vertical working distance 67mm and erecting image have improved operability z The XY stage is mounted on a compact body to support wide travel ranges 50mm㬍50mm for TM 505 100mm㬍50mm for TM 510 for effective me...

Страница 10: ...14 1 2 3 4 5 6 7 1 Eyepiece 2 Diopter adjustment ring 3 Eyepiece mount 4 Optical tube 5 Surface illuminator 6 Objective 7 XY stage 8 Angle dial 9 Angle dial clamp screw 10 Vernier 11 Vernier clamp screw 12 Focusing knob 13 Control panel 14 Power panel ...

Страница 11: ...1 Outline 9 13 Control panel Contour illumination switch Surface illumination switch Light control knob Power switch ...

Страница 12: ...el Surface illuminator cable connector GND terminal The voltage setting method display AC inlet Fuse holder Voltage selector Power panel for CE correspondences Fuse holder Surface illuminator cable connector AC inlet Voltage selector GND terminal ...

Страница 13: ...1 10 Allen key nominal 3 538616 1 1 1 1 11 Vinyl cover 512555 1 1 1 1 12 Spare bulb 㧔24V㧕 383038 1 1 1 1 Spare fuse㧔1A㧕not CE 350279 1 1 1 1 13 Spare fuse㧔1A㧕for CE 384204 1 1 1 1 14 Power cord 1 1 1 1 15 Grounding wire 1 1 1 1 16 User s Manual 1 1 1 1 17 Warranty 1 1 1 1 㧦Keep the mounting screws in the TM 510 510R package They are provided to install the optional mounting jigs on the XY stage 2 ...

Страница 14: ... to the connector on the power panel which is at the back of the Measuring Microscope Insert the cable firmly into the connector and secure it with the nut 3 Set the voltage selector plug to the supply voltage as follows XY stage Clamp screw Bracket Hex socket head screw When the voltage selector on the back panel is as in the upper left figure the combination of two slide switches on the upper an...

Страница 15: ...osition If space for adjusting the vernier scale position is limited re adjust the vernier scale position by referring to 2 4 3 1 Adjusting the reticle to the XY stage movement direction 㩷㩷 2 4 2 Checking the centering of the reticle㩷 Small workpiece To perform dimensional measurement by turning the angle dial or after replacing the reticle align the cross hair with the center of rotation of the ...

Страница 16: ...n the vernier scale Then secure the angle dial with the clamp knob 6㧚 Loosen the adjustment screws and fixing screws 4 pcs each so that the eyepiece mount can be moved manually 㪎䋮 While looking into the eyepiece adjust the position of the eyepiece mount so that the horizontal cross hair is oriented to coincide with the direction of the stage movement 㩷 8㧚 Temporarily secure the eyepiece mount by l...

Страница 17: ...e cross hair Centering is easily performed by moving the eyepiece mount by half the displacement in both the X and Y directions Two pairs of adjustment screws are located at the opposite sides for adjusting the X and Y displacements Adjust the screws in pairs Loosen one on one side and then tighten its counterpart on the other side to adjust the displacement 5䋮 Turn the Micrometer Heads to align a...

Страница 18: ...2 Installation and setup 16 ...

Страница 19: ...ounding conditions into account Be careful not to bump the objective stage glass etc z Objective and Eyepiece The supplied objective and eyepiece were finely adjusted before shipment To maintain performance and accuracy handle them with care and do not disassemble Do not allow the surface of the lens to be scratched or to be exposed to machine oil If the lens is soiled clean it as described in 4 1...

Страница 20: ...g it back and forth 3 1 3 Fixing the workpiece Once the workpiece is mounted secure it to the stage glass Use the fixing jigs secured to the T groove on the XY stage if required The workpiece must be positioned so that the measuring surface faces the objective 䇯 The following optional fixing jigs are available 1 Swivel center support No 176 105 for TM 505 505R 172 197 for TM 510 510R Used to secur...

Страница 21: ... The illuminator is equipped with a green filter 2 Surface illumination Surface illumination shows the surface of a workpiece and is used in observation and inspection of workpiece surfaces Adjust the angle and orientation of this illuminator so the workpiece surface can be observed under optimum conditions 3 Simultaneous use of contour and surface illuminations Both the contour and surface of a w...

Страница 22: ... to be mounted Insert the reticle into the eyepiece mount The reticle is provided with a positioning pin Fit the pin in the groove on the eyepiece mount and insert the eyepiece as far as possible 4 Remove the reticle setting screw and insert the eyepiece Reticle setting screw Reticle setting screw Reticle Reticle Positioning pin Positioning pin 3 1 6 Adjusting the diopter While looking into the ey...

Страница 23: ...e workpiece is stepped or is secured with fixing jigs not to bump the workpiece 3 1 8 Positioning the workpiece Align the measuring direction of the workpiece with the traversing direction of the stage 䋨䋱䋩Follow the procedure in 2 4 3 1 Adjusting the reticle with the XY stage moving direction 䋨䋱䋩Move the workpiece or the fixing jigs to align the measuring direction of the workpiece with the cross ...

Страница 24: ...ign another measuring point with the same cross hair and take the reading at this point The difference between the two readings represents the dimension between the two measuring points A Digimatic Head and Digital Counter can be used in place of the Micrometer Head for digital display of the displacement They also eliminate reading errors Since the zero set button zeroes the counter at any positi...

Страница 25: ...moving the XY stage Take readings from the angle dial 㩷 1䋮In both procedures measuring points on the workpiece are aligned with a cross hair one after another The angle is determined from the difference in readings 2䋮The resolution of the angle dial is 1q with the main scale and 6 with the vernier scale 㩷㩷㩷㩷㩷 Reading the angle dial Main scale䋺34 34 42㶅 Vernier scale䋺42㶅 3䋮The zero position of ...

Страница 26: ...ht measurement attachment and a dial indicator CAUTION This measurement is performed by bringing the measuring faces in focus A high precision measurement cannot be made if using a lens with a large depth of focus To obtain high accuracy measurements use a high magnification lens with a shallow depth of focus as shown below 䃂30x lens with a depth of focus of approximate 0 12mm 䃂150x lens with a de...

Страница 27: ... a circular motion with gauze dampened in high grade alcohol 4 2 Inspection To maintain this microscope in prime condition periodically inspect the parts specified below If the microscope is not operating perfectly inspect it in detail according to the procedure in 5 Troubleshooting 1 Connecting parts DANGER Turn off the power switch and pull out the power cord from the AC outlet to prevent electr...

Страница 28: ...the measuring environment alignment error and other adverse conditions Keeping these factors in mind check the feeding accuracy by measuring a workpiece or a standard scale with an appropriate dimension of 5mm 1 Position a workpiece for which accurate dimensions are known on the stage glass and bring it into focus 2 Align a measuring point on the workpiece with one of the cross hairs according to ...

Страница 29: ...angular hole of the fuse holder and raise the screwdriver grip then a latch will separate and the fuse holder will come out from the front 3 Replace the fuse and replace the fuse holder When a fuse holder is as in the lower left figure 1 Turn off the contour and surface illuminator switches and the power switch and pull out the power cord 2 Insert a screwdriver in the rectangular hole on the fuse ...

Страница 30: ...illumination switch and power switch 2 Remove the stage glass See 2 above 3 Turn the green filter counterclockwise to remove it 4 Remove the bulb by turning it counterclockwise with the supplied bulb setter 5 Mount a new bulb using the bulb setter 6 Turn on the power switch and contour illumination switch Check that the bulb lights 7 Replace the green filter and the stage glass in this order ...

Страница 31: ...kwise with the supplied bulb setter Mount a new bulb using the bulb setter 4 Switch the illuminator select switch knob to the surface illumination 5 Check that the bulb lights 6 Turn on the power switch and surface illumination switch Check that the bulb lights 7 Replace the white filter 4 3 Consumable Parts Order No Name 380405 Stage glass 96x96 for TM 505 505R 380495 Stage glass 154x96 for TM 51...

Страница 32: ...4 Maintenance 30 ...

Страница 33: ...ncrease the light intensity if turned fully counterclockwise Check4䋺 Is the power cord connected correctly YES No Connect the power cord correctly Check5䋺 Is the voltage selector set to the correct voltage YES No Set the voltage selector to the correct voltage Check6䋺 Is the bulb normal conductive YES No Replace the bulb Check7䋺 Is the fuse normal conductive YES No Replace the fuse Check8䋺 Is the ...

Страница 34: ...5䋺 Is the voltage selector set to the correct voltage YES No Set the voltage selector to the correct voltage Check6䋺 Is the bulb normal conductive YES No Replace the bulb Check7䋺 Is the fuse normal conductive YES No Replace the fuse Check8䋺 Is the voltage from the AC outlet normal supplied YES No Supply power to the outlet Check9䋺 Is the voltage at the AC inlet on the main unit normal input YES No...

Страница 35: ... 7 The XY stage will not properly be fed If there is any abnormal tightness play unevenness or sound when the XY stage is fed contact Mitutoyo Should this be the case do not continue to feed the XY stage or disassemble it If the feeding accuracy has deteriorated determine whether the stage or the Micrometer Head is the problem and contact Mitutoyo 8 There is a shadow in the field of view Check for...

Страница 36: ...5 Troubleshooting 34 ...

Страница 37: ...ion 15 z Field number 13 3 Objective z Magnification 2 z Working distance 67mm 2 63 4 XY stage Order No TM 505 TM 505R TM 510 TM 510R Dimensions 152 152mm 240 152mm Stage glass size 96 96mm 154 96mm Feeding range 㧔if used with gauge block㧕 50 50mm 100 50mm Maximum height 115mm 107mm workpiece 5Kg 5Kg 5 Transmitted illuminator z Light source 24V 2W special bulb z Continuously adjustable light inten...

Страница 38: ...Specifications 36 6 Surface illuminator z Light source 24V㧘2W special bulb z Continuously adjustable light intensity 7 Mass TM 505 TM 505R TM 510 TM 510R 13 5Kg 14 0Kg 14 5Kg 15 0Kg 8 Main unit dimensions ...

Страница 39: ...tric screw p 0 25㨪1 0 176 110 Reticle Template Metric screw p 1 25㨪2 0 176 111 Reticle Template Concentric circles Ǿ0 05㨪4 00mm 176 112 Reticle Template Involute gear tooth m0 1㨪1 0 pressure angle 20q reference rack 176 113 Reticle Template 55qangle line 176 114 Reticle Template 60qangle line 176 120 Reticle Template Whiworth screw thread inch 60㨪26TPI 176 121 Reticle Template Whiworth screw threa...

Страница 40: ...d screw thread 24㨪14TPI 176 144 Reticle Template ISO unified screw thread 13㨪10TPI 990561 Chart clip for XY stage 176 366 Fiber optic circular illumination unit 176 344 Twin fiber optics illumination unit twin fiber optic illuminator 264 140 ٌ 2D data processing unit QM Data200 164 161 Digimatic micrometer head MHD 50M 164 162 ً Digimatic micrometer head MHD 2 M 937387 ً Connecting cable 1m connec...

Страница 41: ... Reference Diagrams 㪏 Top view of XY stage TM 505 505R Detail drawing of T groove 8 Reference Diagrams 39 ...

Страница 42: ...8 Reference Diagrams 40 TM 510 510R Detail drawing of T groove ...

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