3. M
easurement
21
3.1.7 Bringing the measuring surface into focus
Bring the measuring surface into focus by moving the optical tube up and down with the focusing
knob. Look into the eyepiece to make sure the cross-hairs are kept in ocular focus during this
focusing operation.
CAUTION
If moving the optical tube, be careful, especially if the workpiece is stepped or is secured with
fixing jigs, not to bump the workpiece.
3.1.8 Positioning the workpiece
Align the measuring direction of the workpiece with the traversing direction of the stage.
䋨䋱䋩
Follow the procedure in
"2.4.3 (1) Adjusting the reticle with the XY stage moving
directio
n".
䋨䋱䋩
Move the workpiece or the fixing jigs to align the measuring direction of the workpiece with the
cross-hair reticle.
After making the above adjustment, confirm that the workpiece is parallel with the traveling direction
by moving the XY stage.
Содержание TM-500 Series
Страница 2: ......
Страница 8: ...CONTENTS vi ...
Страница 18: ...2 Installation and setup 16 ...
Страница 32: ...4 Maintenance 30 ...
Страница 36: ...5 Troubleshooting 34 ...
Страница 41: ... Reference Diagrams 㪏 Top view of XY stage TM 505 505R Detail drawing of T groove 8 Reference Diagrams 39 ...
Страница 42: ...8 Reference Diagrams 40 TM 510 510R Detail drawing of T groove ...