7. Optional Accessories
38
176-127
Reticle (Template) Unified screw thread NF80
㨪
28TPI
176-128
Reticle (Template) Unified screw thread NF24
㨪
14TPI
176-129
Reticle (Template) Unified screw thread NF13
㨪
10TPI
176-130
Reticle (Template) Involute gear tooth m0.1
㨪
1.0 pressure 14” 30’ ,
reference rack
176-135
Reticle (Template) Concentric circles
Ǿ
.01” pitch, maximum diameter
Ǿ
.2”
176-140
Reticle (Template) ISO metric screw thread p=0.075
㨪
0.7
176-141
Reticle (Template) ISO metric screw thread p=0.75
㨪
2.0
176-142
Reticle (Template) ISO unified screw thread 80
㨪
28TPI
176-143
Reticle (Template) ISO unified screw thread 24
㨪
14TPI
176-144
Reticle (Template) ISO unified screw thread 13
㨪
10TPI
990561
Chart clip (for XY stage)
176-366
̪
Fiber-optic circular illumination unit
176-344
̪
Twin fiber optics illumination unit, twin fiber-optic illuminator
264-140
̪
ٌ
2D
data processing unit
QM-Data200
164-161
Digimatic micrometer head
MHD-50M
164-162
ً
Digimatic micrometer head
MHD-2
̢
M
937387
ً
Connecting cable
(1m): connect between MHD-50M and MUX-10F
965013
ً
Connecting cable
(2m): connect between MHD-50M and MUX-10F
264-002
ً
MUX-10F
12AAD194
ً
Connecting cable
C: connect between MUX-10F and QM-Data200
̪
: The order number differs depending on the shipping destination.
ٌ
: When using QM-Data200 it also requires MDH-50M (2 units), connecting cables (2 pcs of either
length), MUX-10F and connecting cable C.
Содержание TM-500 Series
Страница 2: ......
Страница 8: ...CONTENTS vi ...
Страница 18: ...2 Installation and setup 16 ...
Страница 32: ...4 Maintenance 30 ...
Страница 36: ...5 Troubleshooting 34 ...
Страница 41: ... Reference Diagrams 㪏 Top view of XY stage TM 505 505R Detail drawing of T groove 8 Reference Diagrams 39 ...
Страница 42: ...8 Reference Diagrams 40 TM 510 510R Detail drawing of T groove ...