6
Model
005
010
050
100
500
101
201
Fluid
Dry air, N
2
, Non-corrosive / Non-flammable gas
Sensor element
Flow
Measured flow rate range
0 ~ 500 mL/min
0 ~ 1000 mL/min
0 ~ 5 L/min
0 ~ 10 L/min
0 ~ 50 L/min
0 ~ 100 L/min
0 ~ 200 L/min
Flow direction
Unidirection
Pressure
Rated pressure range
-90 ~ 800 kPa
Display
Display
4 digital × 4 digital, 7 segment LCD display ( Red / Green / Orange )
Instant flow
rate
Display range
0 ~ 525 mL/min
0 ~ 1050 mL/min
0 ~ 5.25 L/min
0 ~ 10.50 L/min
0 ~ 52.5 L/min
0 ~ 105.0 L/min
0 ~ 210 L/min
Min. setting
scale
LPM
1 mL/min
0.01 L/min
0.1 L/min
1 L/min
CFM
*1
0.01 ft
3
/min
0.1 ft
3
/min
1 ft
3
/min
Accumulated
Flow
Display range
99999999 mL
999999.99 L
9999999.9 L
99999999 L
Min. Setting Scale
*1
1 mL
0.01 L
0.1 L
1 L
0.01 ft
3
0.1 ft
3
1 ft
3
Pressure
Display
Display range
-100 ~ 1000 kPa
Min. Setting
Scale
kPa
1
kgf/cm
2
0.01
bar / psi
0.01 / 0.1
Accuracy
Flow
Guaranteed range
2 ~ 100 % F.S.
Indicator accuracy
± 3 % F.S. ± 1 digit
*2
Analog output accuracy
± 5 % F.S.
*2
Repeatability
± 1 % F.S. ± 1 digit
*3
Linearity
± 3 % F.S.
*3
Temp. characteristic
± 2 % F.S. ( 15 ~ 35 °C ) ; ± 5 % F.S. ( 0 ~ 15 °C, 35~ 50 °C ) ( compare with
*3
)
Pressure characteristic
± 5 % F.S. ± 1 digit
*4
Pressure
Guaranteed range
0 ~ 100 % F.S.
Indicator accuracy
± 2 % F.S. ± 1 digit
*5
Analog output accuracy
± 2.5 % F.S.
*5
Repeatability
± 0.2 % F.S. ± 1 digit
*5
Linearity
± 1 % F.S. *5
Temp. characteristic
± 2 % F.S. ( compare with
*5
)
Switch output
Switch output
2 NPN : open collector 2 outputs
Max. Load Current : 125 mA
Max. Supply Voltage : 28 V DC
Voltage Drop : ≤ 1.5 V
2 PNP : open collector 2 outputs
Max. Load Current : 125 mA
Max. Supply Voltage : 24 V DC
Voltage Drop : ≤ 1.5 V
Response
time
Flow
800 ms ( 50 ms, 80 ms, 120 ms, 200 ms, 400 ms, 1500 ms selectable )
Pressure
2.5 ms ( 25 ms, 100 ms, 250 ms, 500 ms, 1000 ms, 1500 ms selectable )
Output
mode
Flow
Hysteresis Mode, Window Comparator Mode, Accumulated Output, Accumulated Pulse Output
Pressure
One Point Set Mode, Hysteresis Mode, Window Comparator Mode
Hysteresis
Adjustable
Output short circuit proterction
Yes
Accumulated pulse output
*1
5 mL/Pulse
10 mL/Pulse
0.05 L/Pulse
0.1 L/Pulse
0.5 L/Pulse
1 L/Pulse
2 L/Pulse
0.02 ft
3
/Pulse
0.04 ft
3
/Pulse
0.2 ft
3
/Pulse
0.4 ft
3
/Pulse
2 ft
3
/Pulse
4 ft
3
/Pulse
7 ft
3
/Pulse
Analog output
Voltage output
Voltage output range : 1 ~ 5 V
*6
; Output impedance : 1 KΩ
Current output
Current output range : 4 ~ 20 mA
*6
; Load impedance : ≤ 300 Ω
Response time
Pressure : ≤ 50 ms ; Flow : ≤ 100 ms
External input
Non-voltage input, < 0.4 V, ≥ 30 ms
Communication interface
RS-485
*7
Power
Power supply voltage
12 ~ 24 V DC ± 10 %, Ripple ( P-P ) ≤ 10 %
Current consumption
≤ 50 mA
Environment
Withstand Pressure
1000 kPa
Enclosure
IP40
Working Fluid Temp.
0 ~ 50 °C ( No condensation or freezing )
Ambient Temp. Range
Operation : 0 ~ 50 °C ; Storage : -10 ~ 60 °C ( No condensation or freezing )
Ambient Humidity Range
Operation / Storage : 35 ~ 85 % R.H. ( No condensation )
Insulation Resistance
≥ 50 MΩ ( 500 V DC, between case and lead wire )
Withstand Voltage
1000 V AC in 1-min ( between case and lead wire )
Vibration
Total amplitude 1.5 mm or 10 G, 10 Hz ~ 55 Hz ~ 10 Hz scan for 1 minute, 2 hours each direction of X, Y and Z
Shock
100 m/s² ( 10 G ), 3 times each in direction of X, Y and Z
EMC
IEC 61000-6-2, IEC 61000-6-4
Lead wire
ø4 Oil-resistance cable ( PVC ) - 26 AWG ( 0.15 mm
2
) - 6 cores
Port Size
R6, F1C
R8, F4C
Weight (with 2 meter lead wire)
Approx. 109.3 g ( ø6 port ) ; Approx. 112.7 g ( ø8 port ) ; Approx. 118 g ( Rc1/4" port ) ; Approx. 128.5 g ( Rc1/8" port )
FLOW & PRESSURE SENSOR
( INSTRUCTION MANUAL )
MFP01
Specifications
*1. CFM ( ft
3
/min*10
-2
) and ft
3
*10
-2
*2. Condition: Inlet pressure: 300 kPa , Outlet pressure: 1 atmospheric pressure, 25 °C
*3. Condition: Outlet pressure: 1 atmospheric pressure, 25 °C
*4. -90 ~ 800 kPa, Outlet pressure: 1 atmospheric pressure, 25 °C
*5. Outlet flow rate = 0 L/min, 25 °C
*6. PWM output, corresponding to pressure sensor 0 ~ 1000 kPa
*7. This function only available for Output Specification -02 and -04