Leybold vacuum PhoeniXL300, Техническое руководство

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Warning Messages
90
⏐
GA10.218_1.01 - 11/2004
E52 TMP frequency is too low! • TMP frequency is too low!
• Frequency converter is faulty.
• Turbomolecular pump is faulty.
W53 Temperature at electronic unit
is too high (>55°C)
• Ambient temperature too high.
• Ventilation failure.
• Air filter dirty and have to be changed.
E
54 Temperatur at electronic unit
is too high (>60°C).
• Ambient temperature is too high.
• Internal ventilation has failed.
• Air filters are dirty and must be exchanged.
W55 Temperature at electronic unit
is too low (< 2°C)
• The temperature sensor on the wiring plane indicates T < 2 °C.
Run-up time for the forevacuum pump will be longer.
• Temperature sensor is faulty.
E56 Inlet pressure p1 too low! U < 0,27 V; Kathode defekt.
Change thermovac-sensor that measures p1.
E57 Inlet pressure p1 too high Pressure sensor p1 faulty
E58 Foreline pressure p2 too low! U < 0,27 V; Cathode faulty.
Change thermovac-sensor that measures p2.
E 59 Foreline pressure p2 too high Pressure sensor p2 faulty
E60 p2>10mbar after 5 minutes
since power on
Run-up time of the forevacuum pump is too long.
• Forepump is faulty.
• Valve V2 does not open.
E61 Emission fail. Emission should be switched on. MSV subassembly indicates a
fault. MENB emission current not within range.
W62 Flow through capillary to low. In the sniffer mode the intake pressure of the sniffer line is controlled.
If the pressure falls below the minimum limit, the flow through the
capillary is too low (contamination) or the capillary is blocked (foreign
objects, particles).
The minimum limit can be set by the menu. Default value is 0.1 mbar.
6.6.1.6 .
W63 Capillary broken In the sniffer mode the intake pressure of the sniffer line is controlled.
If the pressure exceeds the maximum limit, the flow through the
capillary is too high (no leak tightness, broken capillary).
The maximum limit can be set by the menu. Default value is 1.0
mbar.
6.6.1.6 .
E64 TMP error:Nomimal speed
has been exceeded by over
10%
E65 TMP error:Pass through time
exceede
E66 TMP error: Bearing tempera-
ture too high (>67°C)
No. Displayed Message Description and possible solutions