Leybold vacuum PhoeniXL300 Скачать руководство пользователя страница 100 | Manualshive

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background image

b

Standard

run-up mode

Run-up time

–

S

Safety Symbols

Setpoint

sniffer line

Sniffer mode

–

START Button

Startup

Stop Button

Storage temperature

–

T

Temperature
• ambient

–

• storage

–

time axis

Time&Date

trend mode

Trigger

Trigger alarm

turbomolecular pump

Type of protection

V

Valves

Vent

volume

W

Weight

Z

Zero

Zero Button

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98
99
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102
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Содержание PhoeniXL300

Страница 1: ...GA10 218_1 02 PhoeniXL300 Leak detector catalog number PhoeniXL300 250000 251000 PhoeniXL300 dry 250001 251001 PhoeniXL300 Modul 250002 technical handbook ...

Страница 2: ...3 2 5Physical Data PhoeniXL300 dry 12 1 3 2 6Electrical Data 13 1 3 2 7Other Data 13 1 3 2 8Ambient Conditions 13 1 3 2 9Physical Data PhoeniXL300 Modul 14 1 3 2 10Electrical Data 14 1 3 2 11Other Data 14 1 3 2 12Ambient Conditions 15 1 4 Unpacking 16 1 4 1 Supplied Equipment 16 1 4 2 Accessories and Options 16 1 4 2 1Sniffer line SL300 16 1 4 2 2Hand set 17 2 Installation 19 2 1 Working Location ...

Страница 3: ...ntroduction 31 4 1 1 Vacuum System PhoeniXL300 31 4 1 1 1Vacuum System PhoeniXL300 dry 32 4 1 1 2Vacuum System PhoeniXL300 Modul 33 4 1 2 Control Panel 35 4 1 2 1LC Display 35 4 1 2 2START Button 35 4 1 2 3STOP Button 35 4 1 2 4ZERO Button 36 4 1 2 5MENU Button 37 4 1 2 6Soft Keys 37 4 1 2 7Numerical Entries 38 4 1 3 Vacuum Method 39 4 1 4 Partial Flow Method 39 4 1 5 Sniffer Mode 40 4 1 6 Control...

Страница 4: ...ge auto manual 53 6 2 3 Time axis 53 6 2 4 Contrast 54 6 2 5 Background in Stand by 54 6 2 6 Lower display limit 55 6 3 Mode 55 6 4 Trigger Alarms 56 6 4 1 Trigger Level 1 56 6 4 2 Trigger Level 2 57 6 4 3 Trigger Level 3 57 6 4 4 Units 57 6 4 5 Volume 57 6 4 6 Alarm delay 58 6 4 7 Audio alarm type 59 6 4 7 1Pinpoint 59 6 4 7 2Leak rate prop 59 6 4 7 3Setpoint 60 6 4 7 4Trigger alarm 60 6 5 Calibr...

Страница 5: ... 6 6 5 Miscellaneous 74 6 6 5 1Time Date 74 6 6 5 2Language 74 6 6 5 3Calibration request 74 6 6 5 4Service interval fore pump 75 6 6 5 5 Service interval oil filter 75 6 6 5 6Service message oil filter 75 6 6 6 Parameter save load 76 6 6 6 1Load parameter set 76 6 6 6 2Save parameter set 1 76 6 6 7 Monitoring functions 76 6 6 7 1Pressure limits for vacuum mode 76 6 6 7 2Pressure limits for sniff ...

Страница 6: ...ing Messages 87 8 1 Hints 87 8 2 List of Errors Warnings 87 9 Maintenance 93 9 1 LEYBOLD Service 93 9 1 1 Maintenance Plan 93 9 1 2 Opening the Phoenix 93 9 1 3 Exchanging the filter mats 94 9 1 4 Exchanging the oil 95 9 1 5 Cleaning 95 9 1 6 Exchanging the fuses 95 9 1 7 Oil filter 97 9 2 Turbo molecular pump 97 Appendix a ...

Страница 7: ...ify the design and the specified data The illu strations are not binding 1 1 Notes on the Use of this Hand book 1 1 1 Safety Symbols Important remarks concerning operational safety and protection are emphasised as follows Attention Information on correct handling or use Disregard can lead to malfunctions or minor equipment damage Caution Information on preventing any kind of physical injury 1 1 2 ...

Страница 8: ...g the start pushbutton provided the PhoeniX has been running previously for at least 20 seconds in the stanby or vent mode If the helium background pre viously suppressed should drop so that for the duration of the zero time only the display limit will be displayed the zero level is adapted automati cally Menu The menu allows the user to program the PhoeniX according to his requi rements The menu ...

Страница 9: ...__________ ____________________________________________ ____________________________________________ 3 Condition of the Vacuum Equipment and Com ponents Has the equipment been used yes no What type of pump oil liquid was used _________ Is the equipment free from potentially harmful substances yes go to Section 5 no go to Section 4 4 Process related Contamination of Vacuum Equipment and Components ...

Страница 10: ...apor rises over the acceptable value So the attribute of the oil changes and danger of corrosion occures for the pump While using the leak detector with condensable gases and steams the oil of the fore pump has to be controlled regularly So you can recognize a condensation of water vapor in the pump Usually the oil is light and lucent When water vapor is inside it gets blear and milky at operating...

Страница 11: ...re 15 mbar Minimum detectable Helium leak rates in vacuum mode 5 10 12 mbar l s in sniffer mode 1 10 7 mbar l s Maximum Helium leak rate which can be displayed 0 1 mbar l s Measurement range 12 decades Time constant of the leak rate signal blanked off 63 of the final value 1 s Pumping speed Helium at the inlet GROSS mode 0 4 l s FINE mode 2 5 l s Detectable masses 2 3 and 4 Mass spectrometer 180 m...

Страница 12: ... up to 31 C linear decreasing to 50 at 40 C Max permissible height above sea level during operation 2000 m Max inlet pressure 15 mbar Minimum detectable Helium leak rates in vacuum mode 2 10 11 mbar l s in sniffer mode 1 10 7 mbar l s Maximum Helium leak rate which can be displayed 0 1 mbar l s Measurement range 12 decades Time constant of the leak rate signal blanked off 63 of the final value 1 s...

Страница 13: ...es solenoid Dimensions L W H in mm 490 x 430 x 315 Weight in kg 35 5 Noise level dB A 54 Audio alarm dB A 95 Contamination level to IEC 60664 1 2 Overvoltage category to IEC 60664 1 II For use within buildings Permissible ambient temperature during operation 10 C 40 C Permissible storage temperature 0 C 60 C Max rel humidity 80 up to 31 C linear decreasing to 50 at 40 C Max permissible height abov...

Страница 14: ...constant of the leak rate signal blanked off 63 of the final value 1 s Pumping speed Helium at the inlet GROSS mode 1 0 l s FINE mode 2 5 l s Detectable masses 2 3 and 4 Mass spectrometer 180 magnetic sector field Ion source 2 filaments Iridium Yttria oxide Inlet port DN 25 KF Run up time after starting 2 min Power supply 100V 230 V 50 60 HZ Power consumption 350 VA Type of protection IP40 Power c...

Страница 15: ... Conditions For use within buildings Permissible ambient temperature during operation 10 C 40 C Permissible storage temperature 0 C 60 C Max rel humidity 80 up to 31 C linear decreasing to 50 at 40 C Max permissible height above sea level during operation 2000 m ...

Страница 16: ...ase use the wedge which is part of the packaging 1 4 1 Supplied Equipment Helium Leak Detector PhoeniX Set of fuses Power cord Folder with documents Technical Handbook PhoeniX Spare Parts List PhoeniX 2 L type screwed connections hose connections 1 hose nozzle Blank flange DN 25 KF Clamping ring DN 25 KF Centering ring DN 25 KF 1 4 2 Accessories and Options The following parts can be ordered addit...

Страница 17: ...nd will be suppressed For cancelling the zero function push the button once more Options for the sniffer line Spare parts for the sniffer line 1 4 2 2 Hand set The hand set is a remote control to operate the PhoeniX from distance up to 30 m It provides the fuctions START STOP VENT ZERO and speaker volume and displays leak rate in bargaraph The remote control is provided with a magnet So it can be ...

Страница 18: ...General Information 18 GA10 218_1 01 11 2004 ...

Страница 19: ...obser ved Caution Before connecting the PhoeniX to the mains you must make sure that the mains voltage rating of the PhoeniX coincides with the locally available mains voltage The instrument must exclusively be connected to a single phase supply with fuses for installation Circuit breaker 10A max according to IEC EN 60898 with trip ping characteristic B Attention Only 3 core mains cables having a ...

Страница 20: ...her with a 0 8 A slow blow fuse The amount of power which can be drawn is limited to 10 W The contacts are numbered from bottom to top 1 Vent 2 Exhaust 3 Gasballast 4 On Off 5 Serial 6 Control 2 7 Record 8 Control 9 Option 10 Remote Fig 2 Pin Assignment 1 24 V constantly applied power supply for the LEY BOLD partial flow valve or sniffer line 2 GND 3 24V switched by the PhoeniX for an external ven...

Страница 21: ...easuring Trigger 3 As Trigger 1 and Trigger 2 Zero active Is closed in case Zero function is running Ready Is closed in case machine is ready for measurement Emission on no error CAL active Closed when machine is in calibrating routine CAL Request Is opend in case of calibration request During external calibration a open output indicates that the external calibrated leak has to be closed Fail Open...

Страница 22: ...Change from low to high activate purge Change from high to low deactivate purge Clear Change from low to high confirm error message CAL Change from low to high When machine is in stand by mode start internal calibration In case machine is measurement mode start external calibration Premise exter nal calibration test leak has to be open and leak rate signal is stable Change from high to low Externa...

Страница 23: ...s limited to 10 mV The instrument which is connected to the recorder output e g X t chart recorder should have an input resistance of no less than 2 5 kΩ The measured values are available through pins 1 and 4 The reference potential GND is available at pins 2 and 3 The contacts are numbered from bottom to top The chart recorder outputs are electrically isolated from other plugs If in spite of this...

Страница 24: ...nected via an extension cable with a RJ45 plug Refer to the Interface Description for more information The hand set does not belong to the standard equipment 2 3 Vaccum Connections 2 3 1 Inlet Port The inlet port is located on the top of the PhoeniX The size of the flange is DN 25 KF A test object or a test chamber has to be connected to the inlet port if the vacuum mode is chosen See Chapter 6 3 ...

Страница 25: ...of the PhoeniX and lead off 2 3 3 Vent Usually the parts under test are vented with ambient air when the test is finished If it is required the parts can be vented with a different gas i e fresh air dry air nitrogen at atmospheric pressure In this case a vent hose has to be connected to the hose coupling Fig 2 1 2 3 4 Gas ballast connection For the mode gas ballast it is recommended to use helium ...

Страница 26: ... 9 mbar l s Trigger level 2 1E 8 mbar l s Trigger level 3 1E 7 mbar l s Leak rate external test leak vacuum 1E 7 mbar l s Leak rate external test leak sniffer 1E 5 mbar l s Vent delay 2 seconds Automatic purge PhoeniXL300 and Modul only on Pressure mbar Minimum volume 0 Beep on Maximum evacuation time 30 minutes Audio Alarm Type Trigger Alarm Max pressure limit for sniff mode 0 15 mbar Min pressur...

Страница 27: ... flange 25 KF if not preassembled at the inlet port A helium test leak with a DN 25 KF adapter optional A forevacuum pump dry or wet version for use with the PhoeniXL300 Module 3 2 Description of the Initial Ope ration Please proceed the following description step by step to start the initial operation Refer to Chapter 5 for a more detailed description 3 2 1 Startup and Measure 1 Unpack the Phoeni...

Страница 28: ...en The start up procedure takes about 2 minutes and the end is indicated by a beep The PhoeniX is in Stand by mode now 4 Check if the inlet port is blanked off If not please mount a blind flange with o ring on the inlet port 5 Press the START Button Fig 4 10 The inlet will be evacuated and the measured leak rate will be displayed a moment later This is the measurement mode If a test part was conne...

Страница 29: ...pears on the display The inlet is vented now 3 2 3 Verification To verify the accuracy please proceed through the following steps A test leak is required If a test leak is not available please continue with 16 11 Remove the blind flange from the inlet port and connect the open helium test leak to the inlet port 12 Press the START Button Fig 4 10 again The inlet will be evacuated and the leak rate ...

Страница 30: ...Operation Check 30 GA10 218_1 01 11 2004 ...

Страница 31: ...ersion to be connected because this unit has no internal roughing pump Another operating mode of the Phoenix is the Sniffer mode which can only be used when a sniffer line See Chapter 1 4 2 is hooked up 4 1 1 Vacuum System PhoeniXL300 The vacuum diagram below shows the major components inside the Phoenix Fig 5 Vacuum Diagramm PhoeniXL300 Pos Description 1 MS Mass Spectrometer Helium sensor 180 mag...

Страница 32: ...evacuate the test parts It is made sure that the pres sure in the mass spectrometer is low enough under all circumstances The valves V1 V2a V2b V4a control the gas flows when measuring Val ves V5 and V6 are used to vent the system and the Turbo pump Valve V7 opens and closes the internal test leak during calibration With the pressure in the test part being lower than ambient pressure sprayed heliu...

Страница 33: ...between 2 5 and 65 m3 h Fig 6 vacuum system PhoeniXL300 dry Pos Description 1 MS Mass Spectrometer Helium sensor 180 magnetic field mass spectrometer 2 Turbomolecular Pump TMP provides high vacumm conditions in the MS 3 V1a V7 Electromagnetic Valves to control the gas flows 4 Diaphragm pump provides the foreline pressure for the TMP und pumps down the parts under test 5 Inlet Port 6 Pirani gauge P...

Страница 34: ...s spectrometer 2 Turbomolecular Pump TMP provides high vacumm conditions in the MS 3 V1a V7 Electromagnetic Valves to control the gas flows 4 Fore pressure pump provides the foreline pressure for the TMP und pumps down the parts under test 5 Inlet Port 6 Pirani gauge P1 7 Pirani gauge P2 MS P 1 V 1 V 2a V 3 V 2b V6 P 2 V4a external pump V 5 V7 1 2 4 5 7 6 ...

Страница 35: ...tton is pushed again in measurement mode the maximum leak rate indicator hold fuction is acitvated This indicator shows the maximum leak rate since START By pressing the START button again the hold function will be started 4 1 2 3 STOP Button Pushing the STOP Button Fig 8 12 interupts the measure procedure If the button is pressed longer the inlet is vented acording to the conditions defined in th...

Страница 36: ...ds After pressing ZERO the decreasing background is fitted to the course automatically So it is possible to recognize leaks even when the signal is decreasing rapidly Please also refer to the pictures below When the measurement signal declines below the saved undergrond value the underground value will automatically be equated with the mea surement signal As soon as the measurement signal is incre...

Страница 37: ... before the menu was left Pushing the MENU button again leads back to the screen of the previous working mode The software shows the last screen that was used before 4 1 2 6 Soft Keys The function of the eight Soft Keys Fig 8 2 9 depends on the current menu Only key 1 very often has the functions Back Cancel Softkey no 1 and OK Softkey no 8 Special Functions When inputs are allowed or when setting...

Страница 38: ...it you need to change To change a digit to a specific number press the corresponding pair of numbers A submenu opens and the desired number can be selected The submenu closes automatically and the next digit of the total num ber now is inverted Having reached the last digit all changes have to be confirmed by OK Soft Key no 8 Example To change the trigger level 1 0 x 10 7 mbar l s to 3 x 10 7 mbar...

Страница 39: ...n to 10 8 mbar l s can be detected Since the rotary vane vacuum pump continues to evacuate the test sam ple via valves V2a V2b and V4a the inlet pressure p1 will continue to drop When the pressure drops below pE 0 2 mbar the PhoeniX will switch to the FINE mode i e valve V1and V2b closes and valve V4a opens so that the gas flow enters the turbomolecular pump at the side This offer two advantages I...

Страница 40: ...via rug ged sniffer line Cat No 252003 For this the KF flange of the sniffer line is connected to the inlet flange and the sniffer mode is selected through menu mode After pressing START the inlet valve opens The sniffer lines have been designed in such a way that the PhoeniX is openrated in the FINE mode as described in Chapter 4 1 3 In the measurement mode the helium present in the ambient air i...

Страница 41: ...key press must be no longer than the time which is defined in the menu The fefault time is 1 5 s The PhoeniX will return to the Standby mode i e all valves except valve V2a are closed This condition is indicated to the operator by the green LED in the START button which is turned off After pressing the STOP VENT button the display will indicate the mes sage Standby Vacuum VENT function When pressi...

Страница 42: ...gh by an amunt which corresponds to the display limit Thus also increases in the leak rate will be visible which are less than the display limit Here the internal zero level is not changed It is not possible to reduce the detection limit of the instrument by pres sing the ZERO button The ZERO function is cancelled by pressing the ZERO button once more The Zero function is also cancelled automati c...

Страница 43: ... at the bargraph on the hand unit comes on The corresponding exponent is indicated at the tip to the right of the bar graph display Two leak rate decades can be indicated by the bargraph display The panel for the upper leak rate decade 1 10 is twice as wide as that for the lower decade 0 1 1 LOCK LED The LOCK LED comes on when the hand unit has been locked ...

Страница 44: ...Working Principle 44 GA10 218_1 01 11 2004 ...

Страница 45: ... respect to your requirements you may start spraying Helium to search for possible leaks When the measurement is finished please press STOP and hold the but ton a few seconds to vent the part under test 5 1 Display The display is used to either show leak rate signals or program specific set ups and get information by means of the software menu Please refer to Chapter 6 In addition messages and mai...

Страница 46: ...t Key no 8 you will find a symbol that allows to switch between the display modes by pres sing Soft Key no 8 5 4 4 Numerical Display Mode and refer to chapter 5 4 5 for explanations of the different display modes Access to calibration Soft Key no 5 and access to the speaker volume Soft Keys no 2 and no 3 is the same in all modes Also the status icons in the upper line are in common in all display ...

Страница 47: ...ical lines a straight line for trigger 1 and a dotted line for trigger 2 In addition the inlet pressure is displayed in smaller figures above the bar graph 5 4 5 Trend Mode In trend mode the leak rates are displayed over time Fig 15 In addition the actual leak rate and inlet pressure also are displayed digitally The time axis can be defined in the menu Please refer to Chapter 6 2 3 Time axis The i...

Страница 48: ...Operation 48 GA10 218_1 01 11 2004 refer to Chapter 6 2 1 Scale linear logarithmic Fig 15 Display Trend Mode ...

Страница 49: ...push button Fig 16 the main menu will be dis played regardless of the current working mode The main menu Fig 16 leads the operator to several submenus described in the following chapters The next page gives an overview of the entire menu architecture Fig 17 Fig 16 The Main Menu ...

Страница 50: ...n Calculate inlet area background Leak rate filter Mass Interfaces Location of Control Define recorder output RS232 Protocoll Define PLC outputs Define PLC inputs Scaling Recorder Output Scaling Recorder Output Miscellaneous Time Date Language Calibration request Service interval fore pump Service interval oil filter Service message oil filter Parameter save load Monitoring functions Pressure limi...

Страница 51: ...ey No Name Description 1 Back Return to the previous screen 2 View Display settings like scaling contrast system background Please refer to Chapter 6 2 3 Mode Selection of the working modes Vacuum Sniff Please refer to Chapter 6 3 4 Trigger Alarms Settings of units trigger levels and alarms Please refer to Chapter 6 4 5 Calibration Calibration of the Phoenix Please refer to Chapter 6 5 6 Settings ...

Страница 52: ...ange auto manual Manual or automatic scaling Please refer to Chapter 6 2 2 4 Time axis Time axis in trend Please refer to Chapter 6 2 3 5 Contrast Display contrast Please refer to Chap ter 6 2 4 6 Background in Stand by Background displayed or not Please refer to Chapter 6 2 5 8 Lower display limit Setting of the display limit Please refer to Chapter 6 2 6 Softkey 2 Linear Pressing this key switch...

Страница 53: ... you have chosen manual display ranging 6 2 3 Time axis Main Menu View Time axis The length of the time axis in trend mode can be changed in given steps between 16 960 seconds Softkey 2 Manual The upper limit of the displayed range can be set manually Softkey 3 Arrow down Decrease the upper limit if manual is chosen The minimum value is 10 11 mbar l s Softkey 5 Helpfunction Softkey 6 Automatic The...

Страница 54: ...es for residual gas are air or absor bed gases from the inner surfaces of the leak detector This internal back ground will never disappear totally Very clean systems which have been pumped for a long time will show a background in the 10 11 mbar l s range Under normal conditions the background level is in the 10 10 mbar l s or low 10 9 mbar l s range When pressing START the current internal backgr...

Страница 55: ...Mode The mode menu Fig 19 enables the submenu to select the different wor king modes Softkey 3 7 Changing of the lower detection limit between 1 x 10 9 and 1 x 10 12 The limit for the PhoeniXL300 dry ranges between 1 x 10 9 and 1 x 10 11 mbarl s Softkey 5 Help Fig 19 The Mode Menu Key No Name Description 1 Cancel Return to the main menu without any chan ges of the present settings 3 Sniff The snif...

Страница 56: ...ed if the leak rate exceeds becomes higher than the pro grammed value Relay Output The trigger relais of the digital out switches Please refer to Chapter 2 2 2 2 Digital out for further details Alarm Loudspeaker Additionally Trigger level 1 defines at which level the various alarm types react See Chapter 6 4 7 Audio alarm type Fig 20 The Trigger Alarms Menu Key No Name Description 1 Back Return to...

Страница 57: ...r atm pressure units and 5 leak rate units mbar l s Pa m3 s 1 Torr l s atm cc s s ft3 yr In Sniff mode the following measuring units are electable Refer to chapter 6 3 ppm g a eq helium leak rate is equivalent with leak rate R134a oz yr eq helium leak rate is equivalent with leak rate R134a 6 4 5 Volume Main Menu Trigger Alarms Volume The minimum loudness and the regular volume of the loudspeaker ...

Страница 58: ...ng is only active for the audio alarm types SETPOINT and TRIGGER ALARM See Chapter 6 4 7 Softkey 2 Arrow down Decrease the minimum loudness The minimum value is 0 Softkey 3 Arrow down Decrease the actual volume The minimum value is limited by the mini mum volume Softkey 4 Beep off Beep on Softkey 5 Help function Softkey 6 Arrow up Increase the minimum volume The maximum value is 15 Softkey 7 Arrow...

Страница 59: ...rigger level 1 is 4 10 7 mbar l s So the window where the tone changes reaches from 4 10 8 mbar l s up to 4 10 6 mbar l s 6 4 7 2 Leak rate prop The frequency of the accoustic output is proportional to the reading on the bargraph display The frequency ranges from 300 Hz to 3300 Hz Please refer to Chapter 6 2 1 Scale linear logarithmic for the definition of the num ber of decades Softkey 2 Pinpoint...

Страница 60: ...e Fig 22 6 4 7 4 Trigger alarm As soon as the leak rate increases above trigger level 1 a multi tone signal is generated The tone does not vary with the leak rate 6 5 Calibration Main Menu Calibration Please refer to Chapter 7 Calibration for a detailed description of the calibra tion Fig 23 Fig 22 Setpoint Fig 23 The Calibration Menu f LR Tr 1 no tone 375 Hz 1000 TR 1 3000 Hz ...

Страница 61: ... related functions See chapter 6 6 1 3 Filter and background See Chapter 6 6 2 4 Mass Switching between helium and hydrogen See Chapter 6 6 3 5 Interfaces Settings for electrical communication andselection for control location See Chapter 6 6 4 6 Miscellaneous Settings like date or time See Chapter 6 6 5 7 Parameter save load Store and load sets of parameters See Chapter 6 6 6 8 Monitoring functio...

Страница 62: ... Refer to chapter 6 6 1 2 Softkey 5 Partial flow setup Refer to chapter 6 6 1 3 Softkey 6 Sniffer factor Refer to chapter 6 6 1 4 Softkey 7 Machine factor Refer to chapter 6 6 1 5 Softkey 8 Leak rate internal test leak Refer to chapter 6 6 1 6 Softkey 2 Automatic purge Refer to chapter 6 6 1 1 Softkey 3 Vent delay Refer to chapter 6 6 1 1 Softkey 4 Vacuum ranges Refer to chapter 6 6 1 2 Softkey 6 ...

Страница 63: ...l vent the inlet port Softkey 2 Automatic purge Refer to chapter Softkey 3 Vent delay Refer to chapter 6 6 1 1 Softkey 4 Vacuum ranges Refer to chapter 6 6 1 2 Softkey 5 Forepump set up Refer to chapter Softkey 6 Sniffer factor Refer to chapter Softkey 7 Machine factor Refer to chapter 6 6 1 5 Softkey 8 Leak rate internal test leak Refer to chapter 6 6 1 6 Softkey 2 Immediately The inlet port will...

Страница 64: ...this mode is running no valve will switch and the leak detector has a high pumping speed Taste No 5 Help Softkey No 6 Partial flow Mode for use with a partial flow system with the catalogue number 14020 Softkey No 7 Normal default settings This is the default setting The activity runs as explained in Chapter 4 1 3 Softkey No 2 GROSS only In this mode the PhoeniX remains at the inlet flange after f...

Страница 65: ...The quick pump time defines whether and how long valve V10 of the par tial flow block is opened For detailed descriptions please refer to the operating instructions GA 10 277 of the partial flow sytem At TQ 0 seconds valve V10 will not be open for the time being This sel ection is recommended for large volumes and dirty objects At TQ endless valve V10 will open when pressing start At an inlet pres...

Страница 66: ...red too small The measured leak rate is multiplied with the machine factor and the result is displayed This factor is only used for vacuum measurement modes not for sniff mode See Chapter 4 1 2 7 Numerical Entries for the description of the entry Softkey 2 Decrease the pumping speed of the partial flow pump The entry of the nominal pumping speed of the partial flow pump can be decreased The minimu...

Страница 67: ...rther runs are multiplied by factor 40 and then shown in the display 6 6 1 6 Leak rate internal test leak Main Menu Settings Vacuum settings Leak rate internal test leak The value of the internal test leak can be set See Chapter 4 1 2 7 Numeri cal Entries for the description of the entry Normally there is no reason to edit the leak rate of the internal test leak besides after a change or a recalib...

Страница 68: ...certain circumstances a positive leak rate can be displayed This setting should be used by experienced users only because of the high possibilities of measuring wrong leak rates Softkey 6 inlet area Additionally to the internal offset the offset of the inlet area will be sub tracted This function for the inlet area is only possible in stand by mode therefore this value has to be determined with th...

Страница 69: ...ftkey 4 RS232 Protocoll Softkey 5 Define PLC outputs Softkey 6 Define PLC inputs Softkey 7 Scaling Recorder Output Softkey 8 PLC sample rate Softkey 2 PLC The PhoeniX is controlled via the Digital In connector See Chapter 6 6 4 1 The START STOP and ZERO buttons at the control panel and remote control are locked Softkey 3 RS232 The PhoeniX is controlled via RS232 interface by an external computer I...

Страница 70: ...vacuum pressure P2 of the PhoeniX will be shown logarithmic LR lin The fundamental output voltage is scaled linear The fundamental voltage is 0 10 V in scalable steps from 0 5 to 10 volts per decade For information about scaling see chapter 6 6 4 6 LR log The fundamental output voltage is scaled logarithmic The voltage output ranges from 1 to 10 V with adjustable steps of 0 5 V to 10 V per decade ...

Страница 71: ...i tion of measuring Trigger 2 Is open in case Trigger Level 1 is exceeded or the machine is not in condi tion of measuring Trigger 3 As Trigger 1 and Trigger 2 Softkey 2 Baudrate and end sign Settings for the baudrate selectable between 1200 and 19200 as well as endsign between CR LF CR or LF Softkey 3 Data Parity Stop bits The settings for Data 7 or 8 Parity Even Odd None and Stop bits 1 or 2 can...

Страница 72: ... Closed all time Recorder Strobe Closed in case recorder output is invalid Only used when record output is set on leak rate 6 6 4 5 Define PLC inputs These inputs can be used to control the PhoeniX with a programmable logic control PLC Description of operation mode of the Digital In Zero Change from low to high activate zero Change from high to low deactivate zero Start Change from low to high act...

Страница 73: ...in Signals at these inputs are only accepted if the location of control is set to PLC or Local and PLC Refer to Chapter 6 6 4 1 6 6 4 6 Scaling Recorder Output Main Menu Settings Interfaces Scaling Recorder Output Here the scaling of the recorder output can be adjusted This adjustment is possible with only when the signal LR lin or LR log is chosen Example Upper limit value is adjusted to 10 5 10V...

Страница 74: ... can be selected whether the operator is reminded of the fact that a cali bration may has become necessary or not The default value is off If the calibration request is switched on a corresponding message will appear when 30 minutes have elapsed after power on or if the tempera ture of the Phoenix has changed by more than 5 C 9 F since the last calibration Softkey 2 Time Date Softkey 3 Language So...

Страница 75: ...intervals to ensure the correct function of the PhoeniX If the service message is activated the PhoeniX reminds you of the required maintenance This setting is only possible for the PhoeniXL300 Attention If the service messages are ignored and the exhaust is not repla ced a risk for overheating the pump motor exists Softkey 3 Decrease The time for the service interval can be decreased in steps of ...

Страница 76: ...ssure limits GROSS and FINE can be changed This might be necessary if other gases than air will be pumped by the PhoeniX The pressure signal from the gas dependant inlet pressure Pirani will dump false signals With changing the pressure limits this pre formance will be adjusted Softkey 2 to 4 The names of the current values can be saved under a free choosable name The saving of 3 different sets is...

Страница 77: ...oes not drop low enough within the periods of time specified here the pump down process is terminated and the display will indicate a message The periods which are selected in each case depend firstly on the desired Softkey No 2 Decrease change over threshold EVAC GROSS Chosable between15 0 2 mbar Default value 15 mbar Softkey No 3 Decrease change over threshold GROSS FINE Chosable between 0 2 0 0...

Страница 78: ...thin this period of time the inlet pressure at the test flange must have dropped below 100 mbar The duration may be selected freely between 1 second and 9 minutes or can be set to endless The default is 30 seconds Softkey No 3 Decreasing maximum time until measurement Within the period of this time the status of measurement readiness must have been attained i e the inlet pressure must have dropped...

Страница 79: ...played on 5 pages e g trigger levels test leak mass date and time Softkey 3 View internal data Information on measured internal data is provided on 10 screens Softkey 4 Vacuum diagram The vacuum diagram of the PhoeniX is shown Here you can see which valves are opend or closed momentarily Softkey 5 View error list The list of occured errors and warnings will be displayed Softkey 6 Calibration histo...

Страница 80: ... or changing the personal identification number PIN No PIN will be checked if 0000 is entered The default setting for the Pin is 0013 Please refer to Chapter 4 1 2 7 Numerical Entries for the description of the entry Fig 28 The Access Control Menu Softkey 3 Access to Zero function Softkey 4 Access to CAL function Softkey 8 Change Menu PIN Softkey 3 Off The calibration function is only available at...

Страница 81: ...he ZERO functions execu tes automatically as soon as the measuring range FINE is reached for the first time after START In this mode the ZERO function also can be execu ted manually via the ZERO button Softkey 3 closed ZERO button disabled Softkey 5 Help Softkey 6 Zero at FINE When reaching the FINE mode the ZERO function is started automati cally Softkey 7 free Softkey ZERO is active ...

Страница 82: ...Menu 82 GA10 218_1 01 11 2004 ...

Страница 83: ...machine has to warm up at least 30 minutes before use 7 2 The calibration routines The calibration routines can be started by pressing button CAL Softkey 5 via 3 different locations main menu Stand by mode measurement mode The access via Stand by mode or measurement mode can possibly be A calibration may be terminated at any time by pressing the STOP Button or using the Soft Key no 1 Cancel Once t...

Страница 84: ...t the display If the leak rates are not identical press Edit leak rate Soft Key no 4 and correct the value If the leak rates are okay press START Soft Key no 8 Fig 29 External Calibration Step 1 No action required Fig 30 External Calibration Step 2 The bargraph display shows a signal which must not vary much If so please press OK Soft Key no 8 Fig 31 External Calibration Step 3 No action required ...

Страница 85: ...figuration or not e g because of a maloperation When calibration is started via SPS or RS232 no testing for plausibility is occuring When calibrating internal it is also monitored if the newly calculated factor of calibration is higher than 10 or lower than 0 1 In this case a warning see W81 resp W82 in chapter 8 2 is displayed and the calibration will be interrupted The bargraph display shows a s...

Страница 86: ...Calibration 86 GA10 218_1 01 11 2004 ...

Страница 87: ... shows a warning triangle 5 4 3 Error Messages Errors are events which force the PhoeniX to interrupt its measurement operations In this case the PhoeniX closes all valves Stand by mode Error messages remain on the LC display until the message has been ack nowledged by pressing Restart key no 8 After that the PhoeniX restarts with a new run up procedure In some cases it may be helpful to check som...

Страница 88: ... time Battery at MC68 is discharged or faulty MC68 had been replaced E29 24V supply for fans ist too low 20V Fuse F1 on wiring backplane has blown E30 24 V of the remote control is too low 20V Fuse F1 on the I O board has blown W31 The offset voltage of the pre amplifier is too high 5mV The preamplifier is faulty W32 Preamplifier temperatur is too high 60 C Ambient temperature is too high Air filt...

Страница 89: ... Anode voltage is limited to about 1 200 V E43 Cathode current is too high Signal MPKZH on MSV board is active Cathode current is too high I 3 6 A MSV is faulty E44 Cathode current is too low Signal MPKZN on MSV board is active Cathode current is too low I 0 2 A MSV is faulty W45 Emission for cathode 1 can not be switched on Signal MSIBE on MSV board is not active Emission for cathode 1 can not be...

Страница 90: ... too high Pressure sensor p2 faulty E60 p2 10mbar after 5 minutes since power on Run up time of the forevacuum pump is too long Forepump is faulty Valve V2 does not open E61 Emission fail Emission should be switched on MSV subassembly indicates a fault MENB emission current not within range W62 Flow through capillary to low In the sniffer mode the intake pressure of the sniffer line is controlled ...

Страница 91: ...de voltage through the service menu Check calibrated leak W78 Differences of signal between test leak open and closed is too low The amplifier voltage difference between opened and closed calibra ted leak is less than 10 mV Calibrated leak has not been closed pro perly W79 Signal of test leak is too small Calibrated leak is too small or has not been opened Preamplifier voltage 10 mV W80 Please cal...

Страница 92: ...ur settings EEPROM on back plane is empty and was initialized with default valves Enter all parameters again The EEPROM might be faulty when warning comes up again after power up W84 EEPROM parameter initiali zed Please check your set tings Software update W85 Lost EEPROM parameter Please check your settings Writing access was interrupted Please check all adjustments An software update was done In...

Страница 93: ... Contamination to the sender s address Before shipping fir the yellow screw on seals on to the connections EXHAUST and GAS BALLAST 9 1 1 Maintenance Plan Maintenance work should be done on the Phoenix as required This work will normally be limited to exchanging the oil in the D2 5E rotary vane pump and the built in air and oil filters As a preventive measure it is recommended that you check the ro...

Страница 94: ... the cover for the for the mechanical section as described above 12 Remove the four Phillips screws see Fig 36 13 Pull the cover over the electronics section back to the rear and place it aside 9 1 3 Exchanging the filter mats The filter mats have been built in to filter the dust out the air which is taken in In order to ensure that the filter mats will not throttle the air flow and so that suffic...

Страница 95: ...e described in the corresponding Operating Instructions GA 01 601 and these must be foolowed closely As already stated in Chapter 9 1 1 only Arctic oil must be used for the D 2 5E pump in the Phoenix 9 1 5 Cleaning The housing of the Phoenix is made of painted plastic parts Thus for the purpose of cleaning only such agents should be used which are generally also used for other painted or plasctic ...

Страница 96: ...onics and mechanical section in the reverse order Nr 1 F1 on MSV Fuse rating T 2A 24 V system voltage of the mass spectrometer supply Loosen control panel two Phillips screws Loosen the panel which holds the MSV board in place two Phillips screws Pull the MSV board the board at the back up to the top For this insert a screwdriver into the two recesses at the sides top one after the other and lever...

Страница 97: ... by an arrow on the fil ter 5 Clean or replace the filter cat no 20028656 6 Screw back the plexiglas cabinet hand tight 7 Check the oil level of the rotary vane pump and fill it up when necessary see instructions for rotary vane pump 9 2 Turbo molecular pump For the Leybold turbo molecular pump TW 70 LS is recommende to change the bearings after 20 000 running hours For details please refer to the...

Страница 98: ...Maintenance 98 GA10 218_1 01 11 2004 ...

Страница 99: ... 2 24 Helium leak rate 1 11 1 12 1 14 Humidity 1 12 1 13 1 15 I information 6 78 Inlet Port 2 24 Inlet port 1 11 1 12 1 14 Inlet pressure 1 11 1 12 1 14 Installation 2 19 Ion source 1 11 1 12 1 14 ion source 4 32 L language 6 74 Leak rate 1 11 1 12 1 14 loud speaker 5 46 M Machine factor 6 66 Mass spectrometer 1 11 1 12 1 14 mass spectrometer 4 32 Measurement range 1 11 1 12 1 14 MENU 4 35 Mode Sn...

Страница 100: ...28 Startup 3 27 Stop Button 3 29 Storage temperature 1 12 1 13 1 15 T Temperature ambient 1 12 1 13 1 15 storage 1 12 1 13 1 15 time axis 5 47 Time Date 6 74 trend mode 5 47 Trigger 5 47 Trigger alarm 6 59 turbomolecular pump 4 32 Type of protection 1 11 1 13 1 14 V Valves 1 12 1 14 Vent 2 25 volume 6 58 W Weight 1 12 1 14 Z Zero 6 81 Zero Button 3 29 ...

Страница 101: ......

Страница 102: ...2 9191 Fax 1 480 752 9494 Service Fon 1 724 327 5700 Fax 1 724 733 3799 Volksrepublik China Leybold Vacuum Tian jin International Trade Co Ltd Beichen Economic Development Area BEDA Tianjin 300400 China Fon 86 22 26970808 Fax 86 22 26974061 Fax 86 22 26972017 leybold leybold com cn Leybold Tianjin Vacuum Equipment Manufacturing Co Ltd Beichen Economic Development Area BEDA Tianjin 300400 China Fon...

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