Leybold vacuum PhoeniXL300, Техническое руководство

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Working Principle
GA10.218_1.01 - 11/2004 ⏐
33
4.1.1.2 Vacuum System PhoeniXL300 Modul
The PhoeniXL300 Modul has no roughing pump integrated as the other
models. Therefore it can be used with an external pump only. This pump
can be oil sealed or a dry version with a roughing capacity between 2,5
and 65 m
3
/h.
Fig. 6 vacuum system PhoeniXL
300
dry
Pos. Description
1
MS: Mass Spectrometer, Helium sensor (180° magnetic field mass
spectrometer)
2 Turbomolecular Pump (TMP, provides high vacumm conditions in
the MS)
3 V1a … V7: Electromagnetic Valves to control the gas flows
4 Diaphragm pump (provides the foreline pressure for the TMP und
pumps down the parts under test)
5 Inlet Port
6 Pirani gauge P1
7 Pirani gauge P2
MS
P
1
V
1
V
2a
V
3
V
2b
P
2
V
V
4 a
4 b
V
6
V
5
V
7
1
2
7
6
5
4