Operating Manual Leica EM ACE600
Version 01/19
Page 105
Since a quartz crystal is sensitive to light and heat the instrument runs a
post-processing. That means final measurement of the quartz frequency is
done some seconds after process end to calculate the final thickness.
After the process is successfully run, a result screen is shown. If a USB data stick
is connected, the log-file can immediately be exported.
Note for finished process: The instrument monitors the layer thickness during
evaporation to stop when the desired value is reached. This includes a correction
for the influence of the light radiation onto the quartz crystal. However, at the end
of the process the quartz reading is again taken after waiting a suitable time to
avoid any influence of the radiation and is then compared to the reading before
starting the deposition. The result is given at the final screen and it indicates the
layer truly deposited on the sample. It may deviate slightly from the reading
displayed during the deposition because the radiation influence on the quartz is
fluctuating with several parameters and can, therefore, be only approximated.
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