Laurell Technologies
Operations Manual WS-400 Lite Series
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
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cannot be changed. For example, if the first step of a program had a set speed of 3000
RPM and a calculated acceleration of 500 RPM per second, it would take 6 seconds to
reach 3000 RPM (Chuck and substrate mass may affect results).
PROCESSING TIP:
The default value (015) will work well for most applications.
Entering values that exceed the capability of the motor will cause overshoots of
the set point speeds. Deceleration values should not exceed 1000 RPM/second,
while acceleration values in excess of 32,000 RPM/second are not usually
achievable with the standard motor.
Figure 3-11
PROGRAM MODE
SECTION 3.6 - NORMAL OPERATION (“OFF/RUN” Mode)
1. Select the program to be run using the
PROGRAM SELECT
key. A letter “A”
through “T” (20 programs) will be indicated in the upper right corner of the
display.
2. Place a wafer on the chuck and, if equipped with a vacuum hold down chuck
press the
VACUUM
key to activate the vacuum valve. Sufficient vacuum to hold
the wafer will be required to start the motor. The requirement to activate vacuum
hold down should always be eliminated when using only non-vacuum chucks.
Contact the factory or read instructions sent with your new non-vacuum chuck to
reconfigure the system for non-vacuum use.
3. Close lid.
4. Press
RUN/STOP
key to start a program. The program will not start until the
vacuum hold down requirement is met (vacuum chucks only), the seal purge
requirement is satisfied, and the lid is closed. The program will stop
automatically if the lid is opened, the CDA/N
2
motor seal purge is not satisfied
(>60 PSI) or the vacuum requirement for hold down is not maintained. The
remaining process time will be maintained.
Acceleration
index (settable)
Calculated
acceleration
(readout only)
