Laurell Technologies
Operations Manual WS-400 Lite Series
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
10
1.2.3 HAZARD AVOIDANCE TEXT
Text is also used to convey methods of avoiding certain hazards and the consequences
that will occur if proper precautions are not taken. (See Figure # 1-2F)
Warning
!
INCOMPATIBLE
MATERIALS
Avoid mixing incompatible
materials in chamber or
waste stream.
Failure to follow operating
instructions could result
in death or injury.
Figure # 1-2F
AVOIDANCE TEXT
1.3 EMERGENCY SHUTDOWN OPTION (station installations only)
This spin processor is
NOT
equipped with its own EMO (Emergency Machine Off)
circuit; it should be powered by a system with EMO capability. If your safety department
or policies allow: simply having the incoming power plug far enough away from the spin
processor, properly labeled and fully accessible may be sufficient.
The EMO button area should be located within easy reach of the spin processor
operator. In the event of an emergency, pressing the EMO button will remove all power
to the spin processor.
After the EMO circuit has been reset and power has been restored, the spin processor
will automatically reset. The spin processor will revert to the normal “power up”
condition. The motor will revert to a “stopped” condition, and any process that was being
performed when the EMO occurred will have been terminated. Any wafer that was
being processed during this shutdown may have incurred some damage and should be
treated as such.
By following the normal steps, described in Section 3.6, for initiating the spin processor,
a new process may be started.
