Laurell Technologies
Operations Manual WS-400 Lite Series
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
23
SECTION 2 - INSTALLATION
2.1 FACILITY REQUIREMENTS
2.1.1 FACILITIES
•
The spin processor should be installed on a vibration free surface in a clean,
temperature and humidity controlled environment to provide the best conditions
for repeatable processing results.
•
Seal Purge - N
2
/CDA (Clean Dry Air) 60 - 70 psi (4.1 – 4.8 bar). N
2
/CDA must be
moisture free. If moisture is present install an air dryer type filter. For particulate
control it is recommended that a point of use filter, 1 micron, or less, be installed
after the regulator and before the processor. The seal purge tubing
MUST NOT
BE “T”
to supply another output from the same regulator.
•
Vacuum - 25 – 28” (635 – 711 mm) Hg of vacuum with a flow volume of 4.5
SCFM (0.11cm/m ) @ 0” Hg
•
Exhaust see section 2.1.8 below
•
Drain – Open to atmosphere – NOT restricted by a vapor trap (see Figure 2-2C)
2.1.2 SPIN PROCESSOR POWER REQUIREMENTS
•
Power - 115 VAC 60 HZ, <3 Amps (7 foot (~200cm) cord with 3 pronged plug)
•
Power - 220 – 240 VAC 50/60 HZ, <3 Amps (7 foot (~200cm) cord with correct
specified plug)
2.1.3 MAIN CIRCUIT BREAKER
•
The circuit breaker on the spin processor is rated for 200A-interrupt current
capacity. SEMI S2 requires a minimum of 10,000 AIC for the main disconnect.
The end-user of the spin processor system should install a suitably rated circuit
breaker (minimum 10,000 AIC) for the circuit if they wish to meet SEMI S2
requirements
2.1.4 DIMENSIONS
•
See Appendix for Basic System Dimensions and Installation Diagrams.
•
Additional space will be required for pressure vessels and pneumatic fluid/N
2
control valves.
2.1.5 AMBIENT TEMPERATURE
•
The Spin processor is designed to run in an ambient temperature of between 68 -
75
°
F (20 -24
°
C).
