Laurell Technologies
Operations Manual WS-400 Lite Series
All information contained in this manual is the property of Laurell Technologies Corporation® and is NOT to be edited, reproduced or
distributed without express written permission from a corporate officer.
14
1.5.3 MOVING PARTS HAZARDS
WARNING
Use care when opening or closing lids. Lids are heavy, and if dropped
accidentally may crush or injure fingers.
WARNING
The chuck on the spin motor can spin in excess of 10,000 rpm. Keep
hands and other body parts away from process chamber area. (Refer
to Section 3.7 for information on changing chucks.)
1.5.4 AUDIO NOISE HAZARDS
Audible sound pressure readings were taken 3 feet (0.9 m) from the
system during normal operation. The background decibel level during
standby was measured to be 48 dB(A). The sound pressure readings
during normal operations were measured to be 51 dB(A). Readings of
less than 80 dB(A) are considered non-hazardous.
1.5.5 CHEMICAL HAZARDS AND COMPATIBILITY
The following section outlines some general guidelines for using chemicals. Refer to
Section 2 for more chemical information.
CAUTION
Each spin processor is configured to use specific chemicals for its
standard process and includes facility gases and fluids, and
maintenance chemicals.
WARNING
The use of incompatible materials in the spin processor is not allowed.
If incompatible materials mix in the process chamber or in the waste
streams, a hazardous and/or toxic chemical reaction may occur. It is
vitally important not to mix or use incompatible materials (i.e., acids
with bases, corrosives with organics, acids with organics, etc.).
Before
any new chemical is used in the spin processor, the compatibility
of the material with other chemicals in the system and the
structural materials used in making the spin processor should be
investigated.
(Refer to Section 1.6.2 for more information on
incompatible chemicals.)
