Mounting axes
page 37
!
For a y-axis, the connector
Axis 2
must be used.
An x-axis (left to right), a z-axis (up and down), a wafer table or a tilting table
can be connected to any of ports 1, 3 and 4. The axes are recognized
automatically.
!
The number of connection cables supplied corresponds to the number of
software-controlled axes that have been ordered. The length of the cables to be
used for each axis depends on the moving ranges of the axis.
Содержание DSA100
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